摘要:
A semiconductor wafer chamfer polishing method for polishing chamfers formed on the edges of semiconductor wafers includes rotating a semiconductor wafer; pressing a polishing cloth against a chamfer of the semiconductor wafer with sufficient pressure to elastically deform the polishing cloth, while supplying polishing fluid to the chamfer; sliding the polishing cloth along an incline of the chamfer from an outer edge toward a center of the semiconductor wafer so as to form a bulge portion of the polishing cloth which contacts an outer surface of the semiconductor wafer, thereby polishing the outer surface along with the chamfer of the semiconductor wafer.
摘要:
o-Methoxy benzoic acid is produced by reacting chlorobenzoic acids having at least one chlorine atom at least at the ortho position with lower alcohol in the presence of a copper salt and a lower alkyl as a catalyst under moderate reaction conditions. o-Methoxy benzoic acid is useful as an intermediate for pharmaceutical, agricultural chemicals, and the like.
摘要:
To take upright articles such as ampules out from a case for storage thereof, the case having a pair of laterally opposite side plates formed with a pair of vertical slots, respectively, which are provided with pointed protrusions, defining notches into which a shutter is removably engaged and thereby held in a posture inclined forward with respect to the transporting direction. A control device is adapted to disengage the shutter from the notches and then to engage the shutter into the other notches so as to erect the shutter. A front ejector plate is inserted into the case and the shutter is removed by a chuck from the case. A pusher plate provided on the inner side of a case rear side plate pushes the ampules forward and the rear ejector is inserted into the case. Then a device for moving the front and rear ejector plates is actuated horizontally and thereby the upright articles are transported onto a conveyor. A case feeding station is provided with a feeding conveyor and a case discharging station is adapted to discharge the empty case having completed transport of the upright articles.
摘要:
A method of preparing diarylchlorophosphate comprising the step of reacting alkyldiarylphosphate represented by formula (1) and thionyl chloride in the presence of a catalyst:R.sup.1 O--P(O)(OAr).sub.2 (1)(where R.sup.1 represents an alkyl group having 1 to 4 carbon atoms, and Ar represents a substituted or unsubstituted aryl group). According to the invention there is provided a method of preparing diarylchlorophosphate having a high purity at a high yield, which can be advantageously used in industrial applications.
摘要:
A manufacturing method for an alkyldihalogenophosphine uses an alkyl halide and a trihalide of phosphorus as starting materials. A reaction product which is formed by an FC reaction is reduced by yellow phosphorus in the presence of iodine, whereby an alkyldihalogenophosphine is manufactured. A high-purity alkyldihalogenophosphine can be manufactured with a high yield by using an excess amount of a trihalide of phosphorus, which can act as a reaction solvent.