Method and apparatus for polishing chamfers of semiconductor wafers
    1.
    发明授权
    Method and apparatus for polishing chamfers of semiconductor wafers 失效
    用于抛光半导体晶片倒角的方法和装置

    公开(公告)号:US5989105A

    公开(公告)日:1999-11-23

    申请号:US902193

    申请日:1997-07-29

    IPC分类号: B24B9/06 H01L21/304 B24B49/00

    CPC分类号: H01L21/02021 B24B9/065

    摘要: A semiconductor wafer chamfer polishing method for polishing chamfers formed on the edges of semiconductor wafers includes rotating a semiconductor wafer; pressing a polishing cloth against a chamfer of the semiconductor wafer with sufficient pressure to elastically deform the polishing cloth, while supplying polishing fluid to the chamfer; sliding the polishing cloth along an incline of the chamfer from an outer edge toward a center of the semiconductor wafer so as to form a bulge portion of the polishing cloth which contacts an outer surface of the semiconductor wafer, thereby polishing the outer surface along with the chamfer of the semiconductor wafer.

    摘要翻译: 用于研磨形成在半导体晶片的边缘上的倒角的半导体晶片倒角抛光方法包括旋转半导体晶片; 在足够的压力下将抛光布压在半导体晶片的倒角上,以使抛光布弹性变形,同时向斜面提供抛光液; 沿着斜面的斜面从抛光布的外边缘朝向半导体晶片的中心滑动抛光布,以形成与半导体晶片的外表面接触的抛光布的凸起部分,从而与外部表面一起抛光 半导体晶片的倒角。

    Method and apparatus for take out and transport of upright objects such
as ampules from storage/transport case and this case itself
    3.
    发明授权
    Method and apparatus for take out and transport of upright objects such as ampules from storage/transport case and this case itself 失效
    用于取出和运输诸如存储/运输案例和本案例之类的取消对象的方法和装置

    公开(公告)号:US5074738A

    公开(公告)日:1991-12-24

    申请号:US564584

    申请日:1990-08-09

    CPC分类号: B65B69/00

    摘要: To take upright articles such as ampules out from a case for storage thereof, the case having a pair of laterally opposite side plates formed with a pair of vertical slots, respectively, which are provided with pointed protrusions, defining notches into which a shutter is removably engaged and thereby held in a posture inclined forward with respect to the transporting direction. A control device is adapted to disengage the shutter from the notches and then to engage the shutter into the other notches so as to erect the shutter. A front ejector plate is inserted into the case and the shutter is removed by a chuck from the case. A pusher plate provided on the inner side of a case rear side plate pushes the ampules forward and the rear ejector is inserted into the case. Then a device for moving the front and rear ejector plates is actuated horizontally and thereby the upright articles are transported onto a conveyor. A case feeding station is provided with a feeding conveyor and a case discharging station is adapted to discharge the empty case having completed transport of the upright articles.

    Method of preparing diarylchlorophosphate
    4.
    发明授权
    Method of preparing diarylchlorophosphate 失效
    磷酸二芳基酯的制备方法

    公开(公告)号:US5550275A

    公开(公告)日:1996-08-27

    申请号:US335345

    申请日:1994-11-03

    IPC分类号: C07F9/14

    CPC分类号: C07F9/1406

    摘要: A method of preparing diarylchlorophosphate comprising the step of reacting alkyldiarylphosphate represented by formula (1) and thionyl chloride in the presence of a catalyst:R.sup.1 O--P(O)(OAr).sub.2 (1)(where R.sup.1 represents an alkyl group having 1 to 4 carbon atoms, and Ar represents a substituted or unsubstituted aryl group). According to the invention there is provided a method of preparing diarylchlorophosphate having a high purity at a high yield, which can be advantageously used in industrial applications.

    摘要翻译: 一种制备二芳基氯磷酸盐的方法,包括在催化剂:R 1 O-P(O)(OAr)2(1)的存在下使式(1)表示的烷基二芳基磷酸酯与亚硫酰氯反应的步骤:其中R 1表示具有1至 4个碳原子,Ar表示取代或未取代的芳基)。 根据本发明,提供了一种以高产率制备高纯度的二芳基氯磷酸盐的方法,其可有利地用于工业应用中。

    Manufacturing method for alkyldihalogenophosphines
    5.
    发明授权
    Manufacturing method for alkyldihalogenophosphines 失效
    烷基二卤代膦的制备方法

    公开(公告)号:US4857238A

    公开(公告)日:1989-08-15

    申请号:US225169

    申请日:1988-07-28

    IPC分类号: B01J27/06 C07B61/00 C07F9/52

    CPC分类号: C07F9/52

    摘要: A manufacturing method for an alkyldihalogenophosphine uses an alkyl halide and a trihalide of phosphorus as starting materials. A reaction product which is formed by an FC reaction is reduced by yellow phosphorus in the presence of iodine, whereby an alkyldihalogenophosphine is manufactured. A high-purity alkyldihalogenophosphine can be manufactured with a high yield by using an excess amount of a trihalide of phosphorus, which can act as a reaction solvent.

    摘要翻译: 烷基二卤代膦的制造方法使用烷基卤和磷的三卤化物作为原料。 通过FC反应形成的反应产物在碘的存在下被黄磷还原,由此制备烷基二卤代膦。 可以通过使用过量的可以作为反应溶剂的磷的三卤化物,以高产率制造高纯度烷基二卤代膦。