Chemoresistor type gas sensor having a multi-storey architecture
    1.
    发明授权
    Chemoresistor type gas sensor having a multi-storey architecture 有权
    具有多层结构的化学电阻式气体传感器

    公开(公告)号:US09194834B2

    公开(公告)日:2015-11-24

    申请号:US14124342

    申请日:2012-06-08

    摘要: A multi-storey gas sensor is constructed by stacking chemoresistor type gas sensing elements and providing holes through each sensing element so gas can pass from one sensing element to the next, through the sensing layers. A rich data set can be obtained by selecting appropriate combinations of materials for the different sensing layers and varying the operating conditions of the different gas-sensing elements by: taking measurements when different combinations of sensing layers are activated, when given sensing layers are heated to different temperatures or according to different heating profiles, and/or when selected sensing layers are exposed to UV light. Sensor sensitivity and selectivity can be increased by applying UV pulses of controlled duration, and target gas species can be detected based on the transient response of the sensing layer at onset of UV irradiation. Each sensing element may have a micro-hotplate architecture.

    摘要翻译: 多层气体传感器通过堆叠化学电阻型气体传感元件并通过每个感测元件提供孔而构成,使得气体可以通过感测层从一个感测元件传递到下一个感测元件。 可以通过选择用于不同感测层的材料的适当组合并且通过以下方式来改变不同气体感测元件的操作条件来获得丰富的数据集:当感测层的不同组合被激活时,当给定的感测层被加热到 不同的温度或根据不同的加热曲线,和/或当选定的感测层暴露于紫外光时。 传感器灵敏度和选择性可以通过施加持续时间的UV脉冲来增加,并且可以基于感测层在UV照射开始时的瞬态响应来检测目标气体种类。 每个感测元件可以具有微电热板结构。

    Chemoresistor Type Gas Sensor having a Multi-Storey Architecture
    2.
    发明申请
    Chemoresistor Type Gas Sensor having a Multi-Storey Architecture 有权
    具有多层架构的化学电阻式气体传感器

    公开(公告)号:US20140105790A1

    公开(公告)日:2014-04-17

    申请号:US14124342

    申请日:2012-06-08

    IPC分类号: G01N27/16

    摘要: A multi-storey gas sensor is constructed by stacking chemoresistor type gas sensing elements and providing holes through each sensing element so gas can pass from one sensing element to the next, through the sensing layers. A rich data set can be obtained by selecting appropriate combinations of materials for the different sensing layers and varying the operating conditions of the different gas-sensing elements by: taking measurements when different combinations of sensing layers are activated, when given sensing layers are heated to different temperatures or according to different heating profiles, and/or when selected sensing layers are exposed to UV light. Sensor sensitivity and selectivity can be increased by applying UV pulses of controlled duration, and target gas species can be detected based on the transient response of the sensing layer at onset of UV irradiation. Each sensing element may have a micro-hotplate architecture.

    摘要翻译: 多层气体传感器通过堆叠化学电阻型气体传感元件并通过每个感测元件提供孔而构成,使得气体可以通过感测层从一个感测元件传递到下一个感测元件。 可以通过选择用于不同感测层的材料的适当组合并且通过以下方式来改变不同气体感测元件的操作条件来获得丰富的数据集:当感测层的不同组合被激活时,当给定的感测层被加热到 不同的温度或根据不同的加热曲线,和/或当选定的感测层暴露于紫外光时。 传感器灵敏度和选择性可以通过施加持续时间的UV脉冲来增加,并且可以基于感测层在UV照射开始时的瞬态响应来检测目标气体种类。 每个感测元件可以具有微电热板结构。