Polysilicon feed-through fluid drop ejector
    2.
    发明授权
    Polysilicon feed-through fluid drop ejector 失效
    多晶硅直通液滴喷射器

    公开(公告)号:US06905196B2

    公开(公告)日:2005-06-14

    申请号:US10431540

    申请日:2003-05-08

    IPC分类号: B41J2/14 B41J2/05

    摘要: A fluid ejector includes a fluid channel having a resistive heater and terminating in a nozzle, a common bus formed transverse to the fluid channel and between the resistive heater and the nozzle, a connection line laterally adjacent to the fluid channel, and a connection structure for electrically connecting the common bus with the resistive heater and the connection line, the connection structure including a first set of one or more layers for electrical connection and a second set of one or more layers for covering the common bus and connection line. The first set of one or more layers includes a doped polysilicon layer on or overlaid by an optional tantalum-silicide layer. The second set of one or more layers includes a nitride layer on or overlaid by a tantalum layer.

    摘要翻译: 流体喷射器包括具有电阻加热器并终止于喷嘴的流体通道,与流体通道横向于电阻加热器和喷嘴之间的公共总线,与流体通道横向相邻的连接管线,以及用于 将公共总线与电阻加热器和连接线电连接,连接结构包括用于电连接的一个或多个层的第一组和用于覆盖公共总线和连接线的一个或多个层的第二组。 第一组一层或多层包括在可选的硅化硅层上或由可选的硅化硅层覆盖的掺杂多晶硅层。 第二组一层或多层包括在钽层上或覆盖钽层的氮化物层。