公开(公告)号：US20200272050A1

公开(公告)日：2020-08-27

申请号：US16284069

申请日：2019-02-25

申请人： Alex P. G. Robinson ,  Carmen Popescu ,  John Roth ,  Andreas Frommhold ,  Edward Jackson ,  Alexandra McClelland ,  Tom Lada ,  Greg O'Callahan

发明人： Alex P. G. Robinson ,  Carmen Popescu ,  John Roth ,  Andreas Frommhold ,  Edward Jackson ,  Alexandra McClelland ,  Tom Lada ,  Greg O'Callahan

IPC分类号： G03F7/021 ,  G03F7/20 ,  G03F7/038

摘要： The present disclosure relates to novel negative-type photoresist composition and methods of their use. The disclosure further relates to multiple trigger photoresist processes which allow for the improvement in contrast, resolution, and/or line edges roughness in some systems without giving up sensitivity. The photoresist compositions and the methods of the current disclosure are ideal for fine patent processing using, for example, ultraviolet radiation, extreme ultraviolet radiation, beyond extreme ultraviolet radiation, X-rays and changed particle. The disclosure further relates to sensitivity enhancing materials useful in the disclosed compositions and methods.

公开(公告)号：US11681227B2

公开(公告)日：2023-06-20

申请号：US16284069

申请日：2019-02-25

申请人： Alex P. G. Robinson ,  Carmen Popescu ,  John Roth ,  Andreas Frommhold ,  Edward Jackson ,  Alexandra McClelland ,  Tom Lada ,  Greg O'Callahan

发明人： Alex P. G. Robinson ,  Carmen Popescu ,  John Roth ,  Andreas Frommhold ,  Edward Jackson ,  Alexandra McClelland ,  Tom Lada ,  Greg O'Callahan

IPC分类号： G03F7/40 ,  G03F7/38 ,  G03F7/023 ,  G03F7/038 ,  G03F7/004 ,  G03F7/021 ,  G03F7/00

CPC分类号： G03F7/40 ,  G03F7/0045 ,  G03F7/0212 ,  G03F7/0233 ,  G03F7/038 ,  G03F7/0382 ,  G03F7/70033

摘要： The present disclosure relates to novel negative-type photoresist composition and methods of their use. The disclosure further relates to multiple trigger photoresist processes which allow for the improvement in contrast, resolution, and/or line edges roughness in some systems without giving up sensitivity. The photoresist compositions and the methods of the current disclosure are ideal for fine patent processing using, for example, ultraviolet radiation, extreme ultraviolet radiation, beyond extreme ultraviolet radiation, X-rays and changed particle. The disclosure further relates to sensitivity enhancing materials useful in the disclosed compositions and methods.

公开(公告)号：US20080241257A1

公开(公告)日：2008-10-02

申请号：US12059483

申请日：2008-03-31

申请人： Carmen Popescu ,  Hayat Onyuksel

发明人： Carmen Popescu ,  Hayat Onyuksel

IPC分类号： A61K9/14 ,  A61K31/7008 ,  A61K31/7042 ,  A61K31/7036 ,  A61K31/7048

CPC分类号： A61K9/5161 ,  A61K31/7036 ,  A61K45/06 ,  A61K2300/00

摘要： Nanoparticles of a biodegradable polymer containing a hydrophilic, cationic drug, like streptomycin, and preparations containing the same, are disclosed. Pharmaceutical preparations containing the nanoparticles are administered, preferably orally, to individuals suffering from a disease or condition, and the nanoparticles release the drug, in vivo, to treat the disease or condition.

摘要翻译： 公开了含有亲水性阳离子药物（如链霉素）的可生物降解聚合物的纳米颗粒，以及包含其的制剂。 含有纳米颗粒的药物制剂优选口服施用于患有疾病或病症的个体，并且纳米颗粒在体内释放药物以治疗疾病或病症。