公开(公告)号：US07763395B2

公开(公告)日：2010-07-27

申请号：US10611070

申请日：2003-06-30

申请人： Alexander (Alex) Tregub ,  Florence Eschbach ,  James Powers ,  Fu-Chang Lo

发明人： Alexander (Alex) Tregub ,  Florence Eschbach ,  James Powers ,  Fu-Chang Lo

IPC分类号： G03F1/00 ,  G03B27/42

CPC分类号： G03F1/62

摘要： An embodiment of the present invention includes a technique to improve stability of a pellicle. The pellicle is pre-baked at a predetermined temperature substantially below a glass transition temperature. The pre-baked pellicle is purged with an inert gas. The purged pellicle is radiated by a radiation at a wavelength. In another embodiment, a chamber is sealed with a pellicle membrane which divides the chamber into first and second compartments. The chamber has an inflow opening in the first compartment and an outflow opening in the second compartment. A gas is injected into the inflow opening and penetrates the pellicle membrane to the outflow opening. In another embodiment, the chamber has first inflow and outflow openings and second inflow and outflow openings in the first and second compartments, respectively. A first gas is injected into the first inflow opening and a second gas into the second inflow opening. The first and second gases have a permeability difference. The first gas penetrates the pellicle membrane to the second outflow opening.

摘要翻译： 本发明的一个实施例包括提高防护薄膜的稳定性的技术。 防护薄膜组件在基本上低于玻璃化转变温度的预定温度下预烘烤。 预烘烤的防护薄膜组件用惰性气体吹扫。 被吹扫的防护薄膜组件以波长的辐射辐射。 在另一个实施例中，用隔热膜密封腔室，隔膜膜将腔室分成第一和第二隔室。 所述腔室在第一隔室中具有流入开口，并且在第二隔室中具有流出开口。 将气体注入到流入口中并将防护薄膜穿透到流出口。 在另一个实施例中，腔室分别具有第一和第二隔室中的第一流入口和第二流入口和第二流入口。 将第一气体注入第一流入口，将第二气体注入第二流入口。 第一和第二气体具有渗透率差异。 第一气体将防护薄膜穿入第二流出口。