公开(公告)号：US06728989B2

公开(公告)日：2004-05-04

申请号：US09771086

申请日：2001-01-27

申请人： Alexander Lerner ,  John M. White ,  Shou-Sang Chang ,  Michael Sugarman

发明人： Alexander Lerner ,  John M. White ,  Shou-Sang Chang ,  Michael Sugarman

IPC分类号： A46B1304

CPC分类号： H01L21/67046 ,  B08B1/04 ,  B08B3/04

摘要： A wafer scrubbing unit includes a mounting assembly for a scrubber brush. The mounting assembly has a rotary flow through tube through which cleaning liquid is delivered to the brush. A stationary tube may be mounted in the bore of the rotary tube. Spinning shields mounted on the rotary tube form labyrinth seals to protect a bearing housing from the cleaning liquid. Bearings for rotatably mounting the rotary tube are mounted within the housing.

摘要翻译： 晶片洗涤单元包括用于洗涤刷的安装组件。 安装组件具有旋转流通管，清洁液通过管被输送到刷子。 固定管可以安装在旋转管的孔中。 安装在旋转管上的旋转屏蔽形成迷宫式密封，以保护轴承壳体免受清洁液体的影响。 用于可旋转地安装旋转管的轴承安装在壳体内。