公开(公告)号：US20200286765A1

公开(公告)日：2020-09-10

申请号：US16809911

申请日：2020-03-05

申请人： Alta Devices, Inc.

发明人： Borirak OPASANONT ,  Abraham SALDIVAR-VALDES ,  Daniel G. PATTERSON

IPC分类号： H01L21/68 ,  H01L21/66 ,  H01L23/544

摘要： Aspects of the present disclosure include methods, apparatuses, and computer readable media for emitting an incident light toward a semiconductor layer of a semiconductor device, wherein the incident light is a sub-bandgap light substantially transparent to the semiconductor layer, detecting a reflected light generated from the incident light penetrating through the semiconductor layer of the semiconductor device and reflecting off of a portion of the semiconductor device, identifying a macroscopic feature underneath the semiconductor layer based on the reflected light, wherein the macroscopic feature corresponds to the portion of the semiconductor device and is visible to the naked eye, and performing an alignment procedure by using the identified macroscopic feature as a reference for the alignment procedure.