公开(公告)号：US20180012724A1

公开(公告)日：2018-01-11

申请号：US15544177

申请日：2015-12-18

Applicant: American Science and Engineering, Inc.

Inventor： Martin Rommel ,  Louis P. Wainwright

IPC: H01J35/30 ,  H01J35/14 ,  G21K1/02

CPC classification number: H01J35/30 ,  G21K1/02 ,  H01J35/14

Abstract: Methods for maintaining a specified beam profile of an x-ray beam extracted from an x-ray target over a large range of extraction angles relative to the target. A beam of electrons is generated and directed toward a target at an angle of incidence with respect to the target, with the beam of electrons forming a focal spot corresponding to the cross-section of the electron beam. At least one of a size, shape, and orientation of the electron beam cross-section is dynamically varied as the extraction angle is varied, and the extracted x-ray beam is collimated. Dynamically varying the size, shape or orientation of the electron beam cross-section may be performed using focusing and stigmator coils.

公开(公告)号：US10535491B2

公开(公告)日：2020-01-14

申请号：US15544177

申请日：2015-12-18

Applicant: American Science and Engineering, Inc.

Inventor： Martin Rommel ,  Louis P. Wainwright

IPC: H01L35/30 ,  H01J35/14 ,  G21K1/02 ,  H01J35/30

Abstract: Methods for maintaining a specified beam profile of an x-ray beam extracted from an x-ray target over a large range of extraction angles relative to the target. A beam of electrons is generated and directed toward a target at an angle of incidence with respect to the target, with the beam of electrons forming a focal spot corresponding to the cross-section of the electron beam. At least one of a size, shape, and orientation of the electron beam cross-section is dynamically varied as the extraction angle is varied, and the extracted x-ray beam is collimated. Dynamically varying the size, shape or orientation of the electron beam cross-section may be performed using focusing and stigmator coils.