公开(公告)号：US20240003684A1

公开(公告)日：2024-01-04

申请号：US18300053

申请日：2023-04-13

Applicant: Analog Devices, Inc.

Inventor： Igor P. Prikhodko ,  Gaurav Vohra ,  Arthur Yurievich Savchenko ,  Xin Zhang

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A gyroscope includes a substrate, a proof mass coupled to the substrate and configured to move in direction of an X axis and in direction of a Y axis orthogonal to the first axis, an X axis shuttle to selectively drive the proof mass along the X axis as a drive axis or sense movement of the proof mass along the X axis as a sense axis in response to the proof mass driven along the Y axis as the drive axis, and a Y axis shuttle to selectively sense movement of the proof mass along the Y axis as a sense axis in response to the proof mass driven along the X axis or drive the proof mass along the Y axis as the drive axis. The X axis shuttle is symmetric to the Y axis shuttle along a diagonal axis that is diagonal to both the X axis and the Y axis. The X and Y axis shuttles have gaps designed for a predetermined DC voltage to generate spring softening (negative cubic nonlinearity) that is equal to spring hardening (positive cubic nonlinearity), ensuring linear motion at high amplitudes (⅓ of the capacitive gap).