公开(公告)号：US20170074656A1

公开(公告)日：2017-03-16

申请号：US14853265

申请日：2015-09-14

Applicant: Analog Devices Global

Inventor： Siddharth Tallur ,  Sunil Ashok Bhave

IPC: G01C19/5698 ,  G01C19/5677

CPC classification number: G01C19/5698 ,  G01C19/5677 ,  G01C19/5684

Abstract: A BAW gyroscope is configured to operate with two pairs of orthogonal modes instead of a single pair in order to mitigate the impact of changes in gaps (e.g., introduced from external stresses such as thermal gradients, external shocks, mechanical stress/torque, etc.). Specifically, the BAW gyroscope resonator is configured to be simultaneously driven to resonate with a two disparate resonant modes (referred to herein as the “fundamental” mode and the “compound” mode), with the same set of drive electrodes used to drive both resonant modes (i.e., all of the drive electrodes are used to drive the two drive modes). When the sensor experiences external rotation, energy couples from the driven modes of vibration to two corresponding orthogonal sense modes via the Coriolis force. The same set of sense electrodes is used to sense both sense modes (i.e., all of the sense electrodes are used to sense the two sense modes). The fundamental mode is differential with respect to the electrodes, while the compound mode is seen as common-mode with respect to the electrodes. Thus, differential gap change will impact offset of rate measured with the fundamental mode only, while common-mode gap change will impact offset of rate measured with the compound mode only.

Abstract translation: BAW陀螺仪被配置为以两对正交模式而不是单对操作，以便减轻间隙变化的影响（例如，从外部应力引起的热梯度，外部冲击，机械应力/扭矩等）。 ）。 具体地说，BAW陀螺仪谐振器被配置为同时驱动以与两个不同的谐振模式（本文中称为“基本”模式和“复合”模式）谐振），其中相同组的驱动电极用于驱动谐振 模式（即所有驱动电极都用于驱动两种驱动模式）。 当传感器经受外部旋转时，能量通过科里奥利力从激励的振动模式耦合到两个对应的正交感测模式。 相同的感测电极组用于感测两种感测模式（即，所有感测电极用于感测两种感测模式）。 基本模式相对于电极是差分的，而复合模式被看作是相对于电极的共模。 因此，差分间隙变化将仅影响基波模式测量速率的偏移，而共模间隙变化将仅影响利用复合模式测量的速率偏移。

公开(公告)号：US10234288B2

公开(公告)日：2019-03-19

申请号：US14853265

申请日：2015-09-14

Applicant: Analog Devices Global Unlimited Company

Inventor： Siddharth Tallur ,  Sunil Ashok Bhave

IPC: G01C19/5677 ,  G01C19/5698

Abstract: A BAW gyroscope is configured to operate with two pairs of orthogonal modes instead of a single pair in order to mitigate the impact of changes in gaps (e.g., introduced from external stresses such as thermal gradients, external shocks, mechanical stress/torque, etc.). Specifically, the BAW gyroscope resonator is configured to be simultaneously driven to resonate with a two disparate resonant modes (referred to herein as the “fundamental” mode and the “compound” mode), with the same set of drive electrodes used to drive both resonant modes (i.e., all of the drive electrodes are used to drive the two drive modes). When the sensor experiences external rotation, energy couples from the driven modes of vibration to two corresponding orthogonal sense modes via the Coriolis force. The same set of sense electrodes is used to sense both sense modes (i.e., all of the sense electrodes are used to sense the two sense modes). The fundamental mode is differential with respect to the electrodes, while the compound mode is seen as common-mode with respect to the electrodes. Thus, differential gap change will impact offset of rate measured with the fundamental mode only, while common-mode gap change will impact offset of rate measured with the compound mode only.