LARGE DISPLACEMENT PRECISION POSITIONING ADJUSTMENT APPARATUS

    公开(公告)号:US20240184093A1

    公开(公告)日:2024-06-06

    申请号:US18508786

    申请日:2023-11-14

    IPC分类号: G02B23/16 G02B23/02

    CPC分类号: G02B23/16 G02B23/02

    摘要: Proposed is a large displacement precision positioning adjustment apparatus including a mirror at an upper end, a fixed plate at a lower portion, linear driving parts including a linear driver performing a large displacement fine operation and a movement supporting part including a guide guiding a movement direction and a fixing part fixing the driver. The linear driver includes a first rotation driving part performing a large displacement movement, a third rotation driving part, a second rotation driving part performing a fine movement, and a moving shaft. The linear driving part includes an upper end connection part connecting an upper end of the linear driving part to the mirror, and a lower end connection part connecting a lower end of the linear driving part and the fixed plate, a first controller controlling a position of the linear driving part, and a second controller controlling a position of the mirror.