公开(公告)号：US5547328A

公开(公告)日：1996-08-20

申请号：US299900

申请日：1994-09-01

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输的容器例如SMIF盒传送到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门本身在清洁容器内的环境之前被清除。

公开(公告)号：US5370491A

公开(公告)日：1994-12-06

申请号：US948148

申请日：1992-09-21

申请人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

发明人： Anthony C. Bonora ,  Gilles Guerre ,  Mihir Parikh ,  Frederick T. Rosenquist, Jr. ,  Sudhir Jain

IPC分类号： B65G49/07 ,  G03F7/20 ,  H01L21/677 ,  B65B1/04

CPC分类号： H01L21/67757 ,  G03F7/7075 ,  H01L21/67772 ,  Y10S414/14

摘要： A method and apparatus for transferring articles from a transportable container, for example, a SMIF pod, to a second container, for example, a processing station having a port which provides access to the interior region of the processing station. A non-contact seal or an isolation cover or skirt seals the port so that the interior region of the container can be purged of contaminants prior to exposing the interior environment of the processing station to the environment within the container. The purging of the container may be a multi-step process in which the container door is moved between several intermediate positions so that the container door itself is purged prior to the purging of the environment within the container.

摘要翻译： 用于将物品从可运输容器（例如SMIF吊舱）转移到第二容器的方法和装置，例如具有提供进入处理站的内部区域的端口的处理站。 非接触式密封件或隔离盖或裙部密封端口，使得在将处理站的内部环境暴露于容器内的环境之前，容器的内部区域可以被清除污染物。 容器的吹扫可以是多步骤过程，其中容器门在几个中间位置之间移动，使得容器门本身在清洁容器内的环境之前被清除。