Semiconductor device with a tantalum iridium barrier layer contact
structure
    1.
    发明授权
    Semiconductor device with a tantalum iridium barrier layer contact structure 失效
    具有钽铱阻挡层接触结构的半导体器件

    公开(公告)号:US4546373A

    公开(公告)日:1985-10-08

    申请号:US575066

    申请日:1984-01-30

    摘要: In a temperature sensor of the kind comprising a bipolar transistor (1) having an adjustable constant current source (3) connected between its collector and base regions (7 and 9) and its emitter region (11) connected to the output of a high gain amplifier (5) whose input is derived from the current source (3), the junction between the emitter and base regions (11 and 9) of the transistor is a heterojunction and each of the emitter and base regions (11 and 9) is provided with a metal contact (17 or 19) separated from the associated region by a barrier layer (21 or 23) of an amorphous tantalum iridium alloy. The use of a heterojunction for the transistor emitter-base junction increases the temperature range of the sensor while the barrier layers ensure metallic stability at the high temperature end of the sensor temperature range.

    摘要翻译: 在包括连接在其集电极和基极区域(7和9)之间的可调恒流源(3)的双极性晶体管(1)的温度传感器及其连接到高增益输出的发射极区域(11) 放大器(5),其输入源自电流源(3),晶体管的发射极和基极区域(11和9)之间的结是异质结,并且提供发射极和基极区域(11和9)中的每一个 具有通过无定形钽铱合金的阻挡层(21或23)与相关区域分离的金属接触(17或19)。 晶体管发射极 - 基极结的异质结的使用增加了传感器的温度范围,而阻挡层确保了传感器温度范围高温端的金属稳定性。