公开(公告)号：US4873430A

公开(公告)日：1989-10-10

申请号：US262558

申请日：1988-10-25

申请人： Anthony Juliana ,  Wai C. Leung ,  Victor T. Pan ,  Hal J. Rosen ,  Timothy C. Strand

发明人： Anthony Juliana ,  Wai C. Leung ,  Victor T. Pan ,  Hal J. Rosen ,  Timothy C. Strand

IPC分类号： G01B11/06 ,  G01B11/30 ,  G01N15/08 ,  G01N21/21 ,  G01N21/55 ,  G01N21/84

CPC分类号： G01N21/8422 ,  G01B11/065 ,  G01B11/303 ,  G01N2015/086 ,  G01N2021/4702 ,  G01N2021/555 ,  G01N21/21 ,  G01N2201/065

摘要： A method for optically measuring at least one characteristic of a thin film on a reflecting substrate. A p-polarized beam of collimated light of known intensity is directed through an integrating sphere onto the film at substantially the Brewster's angle of the film. All the light is reflected into the sphere, including all diffusely reflected light as well as the light specularly reflected at a region inside the sphere where the specularly reflected light is incident. A reflective surface is provided for determining the thickness of the film as a function of the total intensity of light sensed within the sphere. An absorptive surface is provided at said region for absorbing the specularly reflected light for determining the porosity or surface roughness of the film based on the intensity of the diffused light sensed within the sphere not reflected from the substrate.

摘要翻译： 一种用于光学测量反射基板上的薄膜的至少一种特性的方法。 具有已知强度的准直光的p偏振光束以基本上薄膜的布鲁斯特角穿过积分球。 所有的光被反射到球体中，包括所有漫反射光以及在镜面反射光入射的球体内的区域镜面反射的光。 提供反射表面，用于根据在球体内感测的光的总强度来确定膜的厚度。 吸收表面设置在所述区域处，用于吸收镜面反射光，用于基于未从衬底反射的球体内感测到的漫射光的强度确定膜的孔隙率或表面粗糙度。

公开(公告)号：US06704435B1

公开(公告)日：2004-03-09

申请号：US08841214

申请日：1997-04-28

申请人： Wayne Isami Imaino ,  Anthony Juliana ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

发明人： Wayne Isami Imaino ,  Anthony Juliana ,  Milton Russell Latta ,  Charles H. Lee ,  Wai Cheung Leung ,  Hal J. Rosen ,  Steven Meeks ,  Richard Sonningfeld

IPC分类号： G06K900

CPC分类号： G01N21/9506

摘要： A laser based inspection tool (LIT) for inspecting planar surfaces is described. In a preferred embodiment the LIT can simultaneously inspect both planar surfaces of disks for use in disk drives. In one embodiment of the invention, the incident beam is directed onto the surface to be inspected at an angle slightly offset from perpendicular so that the reflected beam is physically separated from the incident beam. The reflected beam is routed to a detector which converts the intensity of the reflected into an analog signal. The analog signal is sampled and digitized to generate pixel data stored in a buffer. Various analyses are performed on the data including calculating a rate of change in the pixel data. If the rate of change in the pixel data exceeds a selected threshold that indicates a possible defect if it occurs in the data area of the disk.

摘要翻译： 描述了一种用于检查平面的激光检测工具（LIT）。 在优选实施例中，LIT可以同时检查用于磁盘驱动器的磁盘的两个平面表面。 在本发明的一个实施例中，入射光束以与垂直稍微偏移的角度被引导到待检查的表面上，使得反射光束与入射光束物理分离。 反射光束被路由到检测器，该检测器将反射的强度转换成模拟信号。 模拟信号被采样和数字化以产生存储在缓冲器中的像素数据。 对包括计算像素数据的变化率的数据进行各种分析。 如果像素数据的变化率超过选择的阈值，如果在磁盘的数据区域中发生可能的缺陷则表示可能的缺陷。