-
公开(公告)号:US20140203193A1
公开(公告)日:2014-07-24
申请号:US14241993
申请日:2012-07-27
申请人: Antonius Theodorus Wilhelmus Kempen , Erik Roelof Loopstra , Corne Rentrop , Dennis De Graaf , Frits Gubbels , Gregory Richard Hayes , Hubertus Johannes Van De Wiel
发明人: Antonius Theodorus Wilhelmus Kempen , Erik Roelof Loopstra , Corne Rentrop , Dennis De Graaf , Frits Gubbels , Gregory Richard Hayes , Hubertus Johannes Van De Wiel
IPC分类号: H05G2/00
CPC分类号: H05G2/008 , G03F7/70033 , G03F7/70916 , H05G2/005 , H05G2/006
摘要: A radiation source having a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location, a laser configured to direct laser radiation at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma. The nozzle has an internal surface that is configured to prevent contamination present in fuel used to form the fuel droplets from being deposited on that internal surface.
摘要翻译: 一种具有喷嘴的辐射源,所述喷嘴被配置为沿着轨迹朝向等离子体形成位置引导燃料液滴流;激光器,被配置成将等离子体形成位置处的燃料液滴处的激光辐射引导,以在使用中产生辐射产生等离子体。 喷嘴具有内表面,其被构造成防止存在于用于形成燃料液滴的燃料中的污染物沉积在该内表面上。
-
公开(公告)号:US09192039B2
公开(公告)日:2015-11-17
申请号:US14241993
申请日:2012-07-27
申请人: Antonius Theodorus Wilhelmus Kempen , Erik Roelof Loopstra , Corne Rentrop , Dennis De Graaf , Frits Gubbels , Gregory Richard Hayes , Hubertus Johannes Van De Wiel
发明人: Antonius Theodorus Wilhelmus Kempen , Erik Roelof Loopstra , Corne Rentrop , Dennis De Graaf , Frits Gubbels , Gregory Richard Hayes , Hubertus Johannes Van De Wiel
CPC分类号: H05G2/008 , G03F7/70033 , G03F7/70916 , H05G2/005 , H05G2/006
摘要: A radiation source having a nozzle configured to direct a stream of fuel droplets along a trajectory towards a plasma formation location, a laser configured to direct laser radiation at the fuel droplets at the plasma formation location to generate, in use, a radiation generating plasma. The nozzle has an internal surface that is configured to prevent contamination present in fuel used to form the fuel droplets from being deposited on that internal surface.
摘要翻译: 一种具有喷嘴的辐射源,所述喷嘴被配置为沿着轨迹朝向等离子体形成位置引导燃料液滴流;激光器,被配置成将等离子体形成位置处的燃料液滴处的激光辐射引导,以在使用中产生辐射产生等离子体。 喷嘴具有内表面,其被构造成防止存在于用于形成燃料液滴的燃料中的污染物沉积在该内表面上。
-