公开(公告)号：US20250155883A1

公开(公告)日：2025-05-15

申请号：US18939065

申请日：2024-11-06

Applicant: Applied Materials, Inc.

Inventor： Prashanth Kothnur ,  Ala Moradian ,  Umesh Madhav Kelkar ,  Phillip Stout ,  Badri Ramamurthi ,  Karthik Ramanathan ,  Ananth Bhoj ,  Dalong Zhao

IPC: G05B19/418

Abstract: In one aspect of the present disclosure, a method includes obtaining, by a processing device, input data indicative of a first set of process parameters. The method further includes providing the input data to a first process model. The method further includes obtaining, from the first process model, first predictive output indicative of performance of a first process operation in accordance with the first set of process parameters. The method further includes providing the first predictive output to a second process model. The method further includes obtaining, from the second process model, second predictive output indicative of performance of a second process operation, different than the first process operation or a repetition of the first process operation, in accordance with the first set of process parameters. The method further includes performing a corrective action in view of the second predictive output.