公开(公告)号：US20240387151A1

公开(公告)日：2024-11-21

申请号：US18198682

申请日：2023-05-17

Applicant: Applied Materials, Inc.

Inventor： BENJAMIN ALEXANDROVICH ,  PETER F. KURUNCZI ,  DAVID MORRELL ,  ADAM CALKINS

IPC: H01J37/32 ,  H01Q7/00

Abstract: An antenna assembly. The antenna assembly may include an antenna, having a loop structure, and a dielectric window, adjacent to the antenna. The antenna assembly may also include a Faraday shield assembly disposed between the antenna and the dielectric window, where the Faraday shield assembly is disposed at least partially around the antenna. The Faraday shield assembly may include a plurality of metallic sections, electrically isolated from one another, where the plurality of metallic sections are arranged into a plurality of shield pairs. As such, a first metallic section and a second metallic section of a given shield pair may be disposed opposite one another and may be electrically connected to one another.