公开(公告)号：US20140237905A1

公开(公告)日：2014-08-28

申请号：US14269534

申请日：2014-05-05

Applicant: Applied Materials, Inc.

Inventor： Benjamin A. Bonner ,  Gopalakrishna B. Prabhu ,  Erik S. Rondum ,  Gregory E. Menk ,  Anand N. Iyer ,  Peter McReynolds ,  Garlen C. Leung

IPC: B24D11/00

Abstract: A chemical mechanical polishing article can be a single contiguous layer having a polishing surface, the layer being an elongated substantially rectangular sheet having a width and a length at least four times greater than the width. Forming a polishing article can include depositing a liquid precursor on a moving belt, at least partially curing the liquid precursor while on the moving belt to form a polishing layer, and detaching the polishing layer from the belt.

Abstract translation: 化学机械抛光制品可以是具有抛光表面的单个邻接层，该层是具有宽度和长度至少比宽度大至少四倍的长度的基本上矩形的片材。 形成抛光制品可以包括在移动的带上沉积液体前体，在移动的带上至少部分地固化液体前体以形成抛光层，并且将抛光层与带分离。