公开(公告)号：US20180339816A1

公开(公告)日：2018-11-29

申请号：US15777905

申请日：2016-12-02

Applicant: Applied Materials, Inc.

Inventor： Ulrich OLDENDORF ,  Christof KLESEN

IPC: B65D45/02

Abstract: Closure device or lock device for a vacuum chamber comprising a counter plate, which can be arranged on a vacuum chamber and surrounds an opening of the vacuum chamber, a frame, which is supported in such a way that the frame can be moved in relation to the counter plate and on which a closure cover is movably arranged, wherein the closure cover closes the opening in sealing manner in a closed position against the counter plate, at least one magnet device for producing a closing force acting between the counter plate and the closure cover, which is in engagement with the counter plate and with the closure cover.

公开(公告)号：US20180350648A1

公开(公告)日：2018-12-06

申请号：US15562319

申请日：2016-04-01

Applicant: APPLIED MATERIALS, INC.

Inventor： Christof KLESEN

IPC: H01L21/68 ,  F16C32/04 ,  H02K7/09 ,  H02K41/03 ,  C23C14/50 ,  C23C16/458

CPC classification number: F16C32/0472 ,  F16C32/0446 ,  F16C32/0465 ,  F16C32/0468 ,  F16C2370/00 ,  F16C2380/18 ,  H01L21/67709 ,  H01L21/67715 ,  H01L21/6776

Abstract: The present invention relates to a device for holding, positioning and/or moving an object, with a base and with a carrier movable relative to the base, at least one magnetic bearing for generating a bearing or holding force between the base and the carrier, wherein the carrier is contactlessly supported on the base via the magnetic bearing, at least one drive acting contactlessly between base and carrier for the displacement of the carrier along the base in at least one transport direction, wherein the drive comprises a linear motor with at least one slider and one stator, which are arranged on the base and on the carrier and which, aside from a displacement force acting along the transport direction, are configured to create a counter-force between base and carrier which counteracts the bearing or holding force.