-
公开(公告)号:US20220393618A1
公开(公告)日:2022-12-08
申请号:US17770237
申请日:2019-11-27
Applicant: Applied Materials, Inc.
Inventor: Henning AUST , Clemens PIHAN , Timo ADLER , Martin AENIS
Abstract: A magnetic levitation system (100) for transporting a carrier (10) in a transport direction (T) is described. The magnetic levitation system includes at least one magnetic bearing (120) having a first actuator (121) with a U-shaped electromagnet for contactlessly holding the carrier (10) in a carrier transportation space (15), and a drive unit (130) having a second actuator (131) for moving the carrier (10) in the transport direction. The second actuator (131) or a projection of the second actuator along the transport direction (T) is partially surrounded by the U-shaped electromagnet.
-
公开(公告)号:US20220208426A1
公开(公告)日:2022-06-30
申请号:US17607599
申请日:2019-04-29
Applicant: Applied Materials, Inc.
Inventor: Henning AUST , Timo ADLER , Clemens PIHAN
IPC: H01F7/02 , H01L21/677 , C23C14/50 , C23C14/56 , C23C16/458 , C23C16/54
Abstract: A magnetic levitation system for transporting a carrier is described. The magnetic levitation system includes a base defining a transportation track, a carrier movable relative to the base along the transportation track, and a plurality of active magnetic bearings provided at the base and configured to face a guided structure of the carrier. The guided structure includes a first guided zone and a second guided zone configured to interact with the plurality of active magnetic bearings and a recessed zone. The recessed zone is arranged between the first guided zone and the second guided zone in a transport direction of the carrier and is recessed with respect to the first guided zone and the second guided zone.
-