公开(公告)号：US11658016B2

公开(公告)日：2023-05-23

申请号：US16409757

申请日：2019-05-10

Applicant: Applied Materials, Inc.

Inventor： Kathleen Scheible ,  Michael Allen Flanigan ,  Goichi Yoshidome ,  Adolph Miller Allen ,  Cristopher Pavloff

IPC: H01J37/34 ,  C23C14/34 ,  C23C14/50 ,  H01L21/687

CPC classification number: H01J37/3488 ,  C23C14/3407 ,  C23C14/50 ,  H01J37/34 ,  H01J37/3441 ,  H01J37/3447 ,  H01L21/68735

Abstract: A shield encircles a sputtering target that faces a substrate support in a substrate processing chamber. The shield comprises an outer band having a diameter sized to encircle the sputtering target, the outer band having upper and bottom ends, and the upper end having a tapered surface extending radially outwardly and adjacent to the sputtering target. A base plate extends radially inward from the bottom end of the outer band. An inner band joined to the base plate at least partially surrounds a peripheral edge of a substrate support. The shield can also have a heat exchanger comprising a conduit with an inlet and outlet to flow heat exchange fluid therethrough.

公开(公告)号：US20190267220A1

公开(公告)日：2019-08-29

申请号：US16409757

申请日：2019-05-10

Applicant: Applied Materials, Inc.

Inventor： Kathleen Scheible ,  Michael Allen Flanigan ,  Goichi Yoshidome ,  Adolph Miller Allen ,  Cristopher Pavloff

IPC: H01J37/34 ,  H01L21/687 ,  C23C14/34 ,  C23C14/50

Abstract: A shield encircles a sputtering target that faces a substrate support in a substrate processing chamber. The shield comprises an outer band having a diameter sized to encircle the sputtering target, the outer band having upper and bottom ends, and the upper end having a tapered surface extending radially outwardly and adjacent to the sputtering target. A base plate extends radially inward from the bottom end of the outer band. An inner band joined to the base plate at least partially surrounds a peripheral edge of a substrate support. The shield can also have a heat exchanger comprising a conduit with an inlet and outlet to flow heat exchange fluid therethrough.