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公开(公告)号：US20240371615A1
公开(公告)日：2024-11-07
申请号：US18770520
申请日：2024-07-11
Applicant: Applied Materials, Inc.
Inventor： DAVID JOHN PETERSON , CHUANG-CHIA LIN
IPC: H01J37/32
Abstract: Embodiments disclosed herein include sensor devices and methods of using the sensor devices. In an embodiment, a sensor device comprises a substrate, a support extending up from the substrate, and a resonator mechanically coupled to the support. In an embodiment, the sensor device further comprises an antenna that is configured to electromagnetically couple with the resonator, wherein the antenna is connected to a transmission line in the substrate.
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