公开(公告)号：US10858735B2

公开(公告)日：2020-12-08

申请号：US16561329

申请日：2019-09-05

Applicant: Applied Materials, Inc.

Inventor： Danny D. Wang ,  Jason Michael Lamb ,  Jun Tae Choi ,  Rupankar Choudhury ,  Zhong Qiang Hua ,  Juan Carlos Rocha-Alvarez

IPC: C23C16/44 ,  B01J3/00 ,  C23C16/455 ,  C23C16/507

Abstract: Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.

公开(公告)号：US10435786B2

公开(公告)日：2019-10-08

申请号：US14522350

申请日：2014-10-23

Applicant: Applied Materials, Inc.

Inventor： Danny D. Wang ,  Jun Tae Choi ,  Rupankar Choudhury ,  Zhong Qiang Hua ,  Juan Carlos Rocha-Alvarez ,  Jason Michael Lamb

IPC: C23C16/44 ,  B01J3/00 ,  C23C16/455 ,  C23C16/507

Abstract: Alignment systems employing actuators provide relative displacement between lid assemblies of process chambers and substrates, and related methods are disclosed. A process chamber includes chamber walls defining a process volume in which a substrate may be placed and the walls support a lid assembly of the process chamber. The lid assembly contains at least one of an energy source and a process gas dispenser. Moreover, an alignment system may include at least one each of a bracket, an interface member, and an actuator. By attaching the bracket to the chamber wall and securing the interface member to the lid assembly, the actuator may communicate with the bracket and the interface member to provide relative displacement between the chamber wall and the lid assembly. In this manner, the lid assembly may be positioned relative to the substrate to improve process uniformity across the substrate within the process chamber.