公开(公告)号：US20200185202A1

公开(公告)日：2020-06-11

申请号：US16664620

申请日：2019-10-25

Applicant: Applied Materials, Inc.

Inventor： Ian WIDLOW ,  Govinda RAJ ,  Gary U. KEPPERS ,  Aravind Dugganna NAIK ,  Francisco RODARTE ,  Sudhir R. GONDHALEKAR ,  Ravikumara KODINAGANHALLI

IPC: H01J37/32 ,  C23C16/44

Abstract: A component, a method of manufacturing a component, and a method of cleaning a component is provided. The component includes a gas flow system within the component, wherein the gas flow system fluidly couples one or more inlet holes and one or more outlet holes. The manufacturing of the component results in an arc shaped groove and a circumferential groove created in the body of the ring. The component undergoes one or more cleaning operations, including rinsing, baking, or purging operations. The cleaning operations remove debris or particles in or on the component, where the debris or particles can be caused during manufacturing of the component, or during use of the component in a semiconductor processing system.

公开(公告)号：US20190226512A1

公开(公告)日：2019-07-25

申请号：US16249731

申请日：2019-01-16

Applicant: Applied Materials, Inc.

Inventor： Govinda RAJ ,  Tom K. CHO ,  Hamid MOHIUDDIN ,  Ian WIDLOW

IPC: F16B5/08 ,  B23K1/00 ,  B23K1/20 ,  C04B37/02

Abstract: Methods of forming a metallic-ceramic brazed joint are disclosed herein. The method of forming the brazed joint includes deoxidizing the surface of metallic components, assembling the joint, heating the joint to fuse the joint components, and cooling the joint. In certain embodiments, the brazed joint includes a conformal layer. In further embodiments, the brazed joint has features in order to reduce stress concentrations within the joint.