公开(公告)号：US20040036851A1

公开(公告)日：2004-02-26

申请号：US10224038

申请日：2002-08-20

Applicant: Applied Materials, Inc.

Inventor： Reginald W. Hunter ,  Joel B. Bailey

IPC: G01J001/04 ,  G01J005/08 ,  G01C003/08 ,  G01J001/42

CPC classification number: G01S7/4818 ,  G01P3/68 ,  G01S17/08

Abstract: Embodiments of the invention provide an improved method and apparatus for sensing position and/or status of an object. For one embodiment, a method generally includes illuminating the object with an optical pulse source and supplying a first optical pulse to a photo-detector, causing a resonant circuit formed by the photo-detector and an inductor to generate a resonant signal. The method also includes supplying at least a second optical pulse to the photo-detector causing a change in the resonant signal, wherein the second optical pulse is reflected from the object, monitoring the change in the resonant signal, and determining a position of the object based on the monitored change in the resonant signal. A velocity, direction of travel and/or acceleration of the object may also be determined from successive position measurements.

Abstract translation: 本发明的实施例提供一种用于感测物体的位置和/或状态的改进的方法和装置。 对于一个实施例，一种方法通常包括用光脉冲源照亮物体，并向光电检测器提供第一光脉冲，使由光电检测器和电感器形成的谐振电路产生谐振信号。 该方法还包括向光检测器提供至少第二光脉冲，引起谐振信号的变化，其中第二光脉冲从物体反射，监测谐振信号的变化，以及确定物体的位置 基于监控的谐振信号的变化。 物体的速度，行进方向和/或加速度也可以从连续的位置测量确定。