公开(公告)号：US20200335312A1

公开(公告)日：2020-10-22

申请号：US16824394

申请日：2020-03-19

Applicant: Applied Materials, Inc.

Inventor： Nicholas M. KOPEC ,  Damon K. COX ,  Andreas SCHMID

IPC: H01J37/32 ,  H01L21/687

Abstract: A method and apparatus for replacing process kits that include edge rings and/or support rings in processing chambers. In one implementation, a process kit comprises a multi-segment edge ring. The multi-segment edge ring comprises a first segment, a second segment, and a first annular body. The first annular body comprises a first upper surface, a first lower surface opposite the first upper surface, a first inner surface and a first outer surface. The first segment and the second segment are connectable to form the first annular body. The first lower surface is operable to be positioned over a substrate support disposed within a processing chamber, and at least a portion of the inner surface, which is positioned between the first upper surface and the first lower surface has a diameter greater than a diameter of a substrate to be processed in the processing chamber.