公开(公告)号：US20180142352A1

公开(公告)日：2018-05-24

申请号：US15808543

申请日：2017-11-09

Applicant: Applied Materials, Inc.

Inventor： Kartik SHAH ,  Nisha Prakash HOLLA ,  Vijaykumar KRITHIVASAN ,  Anantha K. SUBRAMANI ,  Hamid NOORBAKHSH

IPC: C23C16/455 ,  C23C16/44 ,  C23C16/452

Abstract: An apparatus and method for cooling a gas distribution assembly with a cooling plate. The cooling plate having a body having a top surface, an outer perimeter, a center, an inner zone and an outer zone. A plurality of channels formed through the top surface. The plurality of channels having a first outer channel having one or more first outer channel segments configured for flowing a first cooling fluid from a cooling fluid inlet to a cooling fluid outlet and a first inner channel disposed between the first outer channel and the center having one or more first inner channel segments configured for flowing a second cooling fluid from a cooling fluid inlet to a cooling fluid outlet wherein flow in adjacent segments is in an opposite direction.