公开(公告)号：US20220333231A1

公开(公告)日：2022-10-20

申请号：US17706181

申请日：2022-03-28

Applicant: Applied Materials, Inc.

Inventor： Sambhu KUNDU ,  PrasannaKalleshwara Buddappa RAMACHANDRAPPA ,  Sumedh Dattatraya ACHARYA ,  Subramanya P. HERLE ,  Nilesh Chimanrao BAGUL ,  Visweswaren SIVARAMAKRISHNAN

IPC: C23C14/24 ,  C23C14/54

Abstract: A method, system, and evaporation source for reactive deposition is provided. The system includes a deposition surface operable for depositing a material onto a substrate provided on the deposition surface. The system further includes an evaporation source positioned for depositing the material onto the substrate. The evaporation source includes a crucible. The crucible includes a base and at least one sidewall extending upward from the base and defining an interior region of the crucible. The evaporation source further includes a cooling mechanism. The cooling mechanism includes a cylindrical cooling jacket surrounding an outer surface of the at least one sidewall while leaving a bottom surface of the base exposed, wherein a cooling gap is defined between the outer surface of the at least one sidewall of the crucible and an inner surface of a sidewall of the cylindrical cooling jacket.

公开(公告)号：US20240014371A1

公开(公告)日：2024-01-11

申请号：US18199749

申请日：2023-05-19

Applicant: Applied Materials, Inc.

Inventor： PrasannaKalleshwara Buddappa RAMACHANDRAPPA ,  Sambhu Nath KUNDU ,  Visweswaren SIVARAMAKRISHNAN ,  Subramanya P. HERLE

IPC: H01M4/04

CPC classification number: H01M4/0435 ,  H01M4/0471 ,  H01M4/0485 ,  H01M2004/027

Abstract: Embodiments of the present disclosure generally relate to battery technology, and more specifically, methods and systems for preparing lithium anodes. In one or more embodiments, a method for producing a lithium intercalated anode includes introducing a sacrificial substrate containing lithium films and an anode substrate containing graphite into a processing region within a chamber. The method also includes combining the sacrificial and anode substrates overlapping one another around a rewinder roller, rotating the rewinder roller to wind the sacrificial and anode substrates together to produce a rolled anode-sacrificial substrate bundle during a winding process. The method also includes heating the sacrificial substrate, the anode substrate, and/or the rolled anode-sacrificial substrate bundle while rotating the rewinder roller and applying a force to the rolled anode-sacrificial substrate bundle via an idle roller during the winding process.

公开(公告)号：US20220372614A1

公开(公告)日：2022-11-24

申请号：US17731565

申请日：2022-04-28

Applicant: Applied Materials, Inc.

Inventor： Sambhu KUNDU ,  PrasannaKalleshwara Buddappa RAMACHANDRAPPA ,  Subramanya P. HERLE ,  Visweswaren SIVARAMAKRISHNAN

IPC: C23C14/56

Abstract: Embodiments of the present disclosure generally relate to flexible substrate fabrication. In particular, embodiments described herein relate to an apparatus and methods for flexible substrate fabrication using nip rollers to improve tension uniformity. In one embodiment, a roller assembly includes a primary roller for transporting a flexible substrate, wherein the primary roller has a first end and a second end, wherein the flexible substrate has a coating disposed hereon, and wherein one or more edge regions are not covered by the coating. The roller assembly further includes a first nip roller disposed at the first end of the primary roller that contacts a first edge region of the one or more edge regions, and a second nip roller disposed at the second end of the primary roller that contacts a second edge region of the one or more edge regions.

公开(公告)号：US20240142290A1

公开(公告)日：2024-05-02

申请号：US18382314

申请日：2023-10-20

Applicant: Applied Materials, Inc.

Inventor： Ajay Balaram MORE ,  Sambhu KUNDU ,  PrasannaKalleshwara Buddappa RAMACHANDRAPPA ,  Terry BLUCK ,  Visweswaren SIVARAMAKRISHNAN

IPC: G01F23/24

CPC classification number: G01F23/241

Abstract: Methods and systems for the measurement of molten metal and metal alloy levels within a crucible are provided. The system includes a crucible, a probe having an electrode disposed at a lowermost probe position, and a processing system configured to receive a signal from the electrode to evaluate whether the electrode is in contact with the liquid metal. The system can include a plurality of probes, with each probe having an electrode positioned at a different height within the crucible interior. A multi-probe system can inform a system user on molten metal levels at various sectors within the crucible interior.

公开(公告)号：US20230048728A1

公开(公告)日：2023-02-16

申请号：US17881368

申请日：2022-08-04

Applicant: Applied Materials, Inc.

Inventor： Sambhu KUNDU ,  PrasannaKalleshwara Buddappa RAMACHANDRAPPA ,  Vicente M. LIM ,  Subramanya P. HERLE ,  Visweswaren SIVARAMAKRISHNAN

IPC: C23C14/24 ,  C23C14/54 ,  C23C14/56

Abstract: A method and apparatus for thermal evaporation are provided. The thermal evaporator includes a flat crucible design, which provides an increased surface area for evaporation of the material to be deposited relative to conventional designs. The increased surface area for evaporation means that the more vapor of the evaporated material can be produced, which increases pressure inside the evaporator body leading to increased flow of the evaporated material out of the nozzles. The flat crucible can be attached to an evaporator body of the thermal evaporator. The flat crucible can be integrated within the evaporator body. The evaporator body can include a plurality of longitudinal grooves, which increase the surface area of the evaporator body. The thermal evaporator can include a plurality of baffles which divide the thermal evaporator into separate compartments.