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公开(公告)号：US12209663B2
公开(公告)日：2025-01-28
申请号：US18215604
申请日：2023-06-28
Applicant: Applied Materials, Inc.
Inventor： Yao-Hung Yang , Chih-Yang Chang , Sam Hyungsam Kim
Abstract: A sealing member includes a monolithic body including a first portion adjoining a second portion. The first portion forms part of a circle. The second portion includes first and second lobes. Each lobe adjoins the first portion with a concave surface. In one example, each lobe includes a rounded tip, and a convex surface extends from one rounded tip to the other rounded tip.
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