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公开(公告)号:US09437640B2
公开(公告)日:2016-09-06
申请号:US14481038
申请日:2014-09-09
Applicant: Applied Materials, Inc.
Inventor: Sherry Mings , Patricia M. Liu , Steven C. H. Hung
IPC: H01L27/14 , H01L27/146
CPC classification number: H01L27/14643 , H01L27/1462 , H01L27/14621 , H01L27/14625 , H01L27/14627 , H01L27/1464 , H01L27/14689
Abstract: Backside illuminated sensors and methods of manufacture are described. Specifically, a backside illuminated sensor with a dipole modulating layer near the photodiode is described.
Abstract translation: 描述背面照明传感器和制造方法。 具体来说,描述了在光电二极管附近具有偶极子调制层的背面照明传感器。