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公开(公告)号：US20190157047A1
公开(公告)日：2019-05-23
申请号：US16192610
申请日：2018-11-15
Applicant: Applied Materials, Inc.
Inventor： Yikai Chen , Shyh-Nung Steve Lin
Abstract: A method for forming a ceramic coating on an article includes placing the article into a chamber or spray cell of a plasma spraying system. A first ceramic powder is then fed into the plasma spraying system at a first powder feed rate, and a first layer of a plasma resistant ceramic coating is deposited onto at least one surface of the article in a plasma spray process by the plasma spray system. The powder feed rate is adjusted to a second powder feed rate, and a second layer of the plasma resistant ceramic coating is deposited onto the at least one surface of the article in the plasma spray process by the plasma spray system.
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