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公开(公告)号：US20190338412A1
公开(公告)日：2019-11-07
申请号：US15544891
申请日：2017-01-31
Applicant: Applied Materials, Inc.
Inventor： Srinivas SALUGU , Stefan BANGERT , Stefan KELLER
Abstract: A material deposition arrangement for depositing a material on a substrate in a vacuum deposition chamber is described. The material deposition arrangement comprises at least one material deposition source having a crucible configured to evaporate the material, a distribution assembly connected to the crucible, wherein the distribution assembly is configured for providing the evaporated material to the substrate, and a valve configured to control a flow of the evaporated material from the crucible to the distribution assembly.
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