公开(公告)号：US20220293452A1

公开(公告)日：2022-09-15

申请号：US17688712

申请日：2022-03-07

Applicant: Applied Materials, Inc.

Inventor： Alexander SULYMAN ,  Carlaton WONG ,  Rajinder DHINDSA ,  Timothy Joseph FRANKLIN ,  Steven BABAYAN ,  Anwar HUSAIN ,  James Hugh ROGERS ,  Xue Yang CHANG

IPC: H01L21/687 ,  H01L21/683

Abstract: Methods and apparatus for a lift pin mechanism for substrate processing chambers are provided herein. In some embodiments, the lift pin mechanism includes a lift pin comprising a shaft with a top end, a bottom end, and a coupling end at the bottom end; a bellows assembly disposed about the shaft. The bellows assembly includes an upper bellows flange having an opening for axial movement of the shaft; a bellows having a first end coupled to a lower surface of the upper bellows flange such that the shaft extends into a central volume surrounded by the bellows; and a bellows guide assembly coupled to a second end of the bellows to seal the central volume. The shaft is coupled to the bellows guide assembly at the coupling end. The bellows guide assembly is axially movable to move the lift pin with respect to the upper bellows flange.

公开(公告)号：US20210287881A1

公开(公告)日：2021-09-16

申请号：US17156957

申请日：2021-01-25

Applicant: APPLIED MATERIALS, INC.

Inventor： Timothy Joseph FRANKLIN ,  Carlaton WONG ,  Reyn Tetsuro WAKABAYASHI ,  Daniel Sang BYUN ,  Steven BABAYAN

IPC: H01J37/32 ,  H01L21/687

Abstract: An apparatus for processing substrates that includes a process chamber with a process volume located above a substrate support assembly surrounded by an edge ring, an upper electrode located above the process volume and a conductive tuning ring surrounding the upper electrode and in electrical contact with the upper electrode. The conductive tuning ring has at least one gas port on a lower surface above the edge ring. The conductive tuning may also have at least one stepped portion on the lower surface that forms an extended bottom surface. In some embodiments, the extended bottom surface may slant radially inwardly or radially outwardly. In some embodiments, the extended bottom surface may have one or more radiused edges.