公开(公告)号：US20240352580A1

公开(公告)日：2024-10-24

申请号：US18303391

申请日：2023-04-19

Applicant: Applied Materials, Inc.

Inventor： Zaoyuan Ge ,  Prasath Poomani ,  Yin Xiong ,  Ajit Laxman Kulkarni ,  Sungwon Ha ,  Amit Bansal ,  Abdul Aziz Khaja ,  Sarah Michelle Bobek ,  Badri N. Ramamurthi

IPC: C23C16/44 ,  C23C16/52

CPC classification number: C23C16/4408 ,  C23C16/4412 ,  C23C16/52

Abstract: Exemplary semiconductor processing chambers may include a chamber body having sidewalls and a base. The chambers may include a pumping liner seated atop the chamber body. The pumping liner may at least partially define an annular pumping plenum and at least one exhaust aperture that fluidly couples the pumping plenum with an interior of the chamber body. The chambers may include a purge ring seated below the pumping liner. The purge ring may define an annular channel that extends about a body of the purge ring. The purge ring may define a gas inlet that is fluidly coupled with the annular channel. The purge ring may define purge ports that are disposed at different radial positions about the purge ring, each of the purge ports being aligned and in fluid communication with the pumping plenum. The chambers may include a purge gas source coupled with the gas inlet.

公开(公告)号：US20230120710A1

公开(公告)日：2023-04-20

申请号：US17502873

申请日：2021-10-15

Applicant: Applied Materials, Inc.

Inventor： Zaoyuan Ge ,  Yin Xiong ,  Sungwon Ha ,  Abdul Aziz Khaja ,  Amit Bansal ,  Prasath Poomani ,  Ajit Laxman Kulkarni ,  Sarah Michelle Bobek ,  Badri N. Ramamurthi

IPC: C23C16/44 ,  H01L21/02

Abstract: Exemplary processing chambers may include a body having sidewalls and a bottom plate. The bottom plate may define an exhaust opening and a gas inlet. The chambers may include a faceplate seated atop the body. The chambers may include a purge ring seated atop the bottom plate. The purge ring may include a ring body having an outer edge and an inner edge defining an open interior. The ring body may have a surface disposed against the bottom plate. The ring body may define an opening aligned with the exhaust opening. The surface may define a fluid port aligned and coupled with the gas inlet. The surface may define arcuate grooves extending into the fluid port. The arcuate grooves may be parallel with the inner and outer edges. The surface may define radial grooves extending from the open interior to an arcuate groove.