公开(公告)号：US20210343000A1

公开(公告)日：2021-11-04

申请号：US16866463

申请日：2020-05-04

Applicant: Applied Materials Israel Ltd.

Inventor： Ran SCHLEYEN ,  Eyal ZAKKAY ,  Boaz COHEN

IPC: G06T7/00

Abstract: There is provided a system comprising a processor configured to obtain a set of images of a semiconductor specimen, (1) for an image of the set of images, select at least one algorithmic module MS out of a plurality of algorithmic modules, (2) feed the image to MS to obtain data DMS representative of one or more defects in the image, (3) obtain a supervised feedback regarding rightness of data DMS, (4) repeat (1) to (3) for a next image until a completion criterion is met, wherein an algorithmic module selected at (1) is different for at least two different images of the set of images, generate, based on the supervised feedback, a score for each of a plurality of the algorithmic modules, and use scores to identify one or more algorithmic modules Mbest as the most adapted for providing data representative of one or more defects in the set of images.