公开(公告)号：US20240046445A1

公开(公告)日：2024-02-08

申请号：US17880535

申请日：2022-08-03

Applicant: Applied Materials Israel Ltd.

Inventor： Gilad VERED ,  Dror ALUMOT ,  Uri HADAR ,  Elran GAMZO

IPC: G06T7/00 ,  G06T7/50

CPC classification number: G06T7/001 ,  G06T7/50 ,  G06T2207/30148

Abstract: There is provided a system and method of examining a specimen comprising a first layer and a second layer. The method comprises obtaining a recipe including a template image for each reference polygon in a reference image and a template mask indicative of proximity of a set of locations in the template image to an edge of the reference polygon; obtaining an inspection image in runtime; identifying first inspection polygons in the inspection image corresponding to the first reference polygons using template images and template masks thereof; determining a first shift for the first layer based on the first locations, and registering the first reference polygons with the inspection image based on the first shift. Similarly, a second shift for the second layer can be determined, and the second reference polygons can be registered with the inspection image based on the second shift.