公开(公告)号：US20220293522A1

公开(公告)日：2022-09-15

申请号：US17199143

申请日：2021-03-11

Applicant: Arm Limited

Inventor： Sriram Thyagarajan ,  Ettore Amirante ,  Andy Wangkun Chen ,  Yew Keong Chong ,  Sony .

IPC: H01L23/528 ,  G06F30/3953 ,  H01L23/522 ,  G06F119/06

Abstract: Various implementations described herein are directed to a method for routing buried power rails underneath a memory instance. The method may identify first rails of the buried power rails disposed in a first layer and second rails of the buried power rails disposed perpendicular to the first rails in a second layer. The method may identify long rails of the first rails with a first length and short rails of the first rails with a second length that is less than the first length. The method may separately couple the long rails and the short rails to the second rails with vias that extend between the first layer and the second layer.