Vacuum pump with rotor supporting gas bearings
    1.
    发明授权
    Vacuum pump with rotor supporting gas bearings 失效
    真空泵带转子支撑气体轴承

    公开(公告)号:US06368082B1

    公开(公告)日:2002-04-09

    申请号:US09543300

    申请日:2000-04-05

    IPC分类号: F04B1700

    摘要: A vacuum pump including a housing having a suction flange and an outlet opening, a plurality of stationary and rotatable pump-active elements arranged in the housing, a rotor shaft for supporting the rotatable elements, a system of gas bearings for supporting the rotor shaft, with the gas bearings being substantially formed of stator elements with gas delivery conduits and gas outlets, and a system of resilient elements for connecting the stator elements with the bearing housing.

    摘要翻译: 一种真空泵,包括具有抽吸凸缘和出口的壳体,布置在壳体中的多个静止和可旋转的泵有源元件,用于支撑可旋转元件的转子轴,用于支撑转子轴的气体轴承系统, 气体轴承基本上由具有气体输送导管和气体出口的定子元件形成,以及用于将定子元件与轴承壳体连接的弹性元件系统。

    Vacuum pump
    2.
    发明授权
    Vacuum pump 有权
    真空泵

    公开(公告)号:US06464451B1

    公开(公告)日:2002-10-15

    申请号:US09655981

    申请日:2000-09-06

    IPC分类号: F04D500

    CPC分类号: F04D17/168 F04D19/046

    摘要: A vacuum pump, including a housing having inlet and outlet; a shaft arranged in the housing and supported bearing provided in the housing, drive for rotating the shaft; and a plurality of pumping units arranged in the housing and formed each of rotational and stationary gas delivery components with the rotational components being supported on the shaft and the stationary components being connected with the housing, at least one of the pumping units consisting of a plurality of connected parallel to each other and arranged one after another in an axial direction, molecular pumping stages with each pumping stage being formed based on Gaede principle; with the molecular pumping stages being connected with each other in common connection channels.

    摘要翻译: 一种真空泵,包括具有入口和出口的壳体; 布置在壳体中的轴和设置在壳体中的支撑轴承,用于使轴旋转的驱动; 以及布置在所述壳体中并且形成旋转和静止的气体输送部件中的每一个的多个泵送单元,所述旋转部件被支撑在所述轴上,并且所述固定部件与所述壳体连接,所述泵送单元中的至少一个由多个 彼此平行连接并沿轴向依次布置,基于Gaede原理形成具有每个泵送阶段的分子泵送阶段; 其中分子泵送级在公共连接通道中彼此连接。

    Gas friction pump
    3.
    发明授权
    Gas friction pump 失效
    气摩擦泵

    公开(公告)号:US06676384B2

    公开(公告)日:2004-01-13

    申请号:US10093204

    申请日:2002-03-07

    申请人: Wolfgang Eberl

    发明人: Wolfgang Eberl

    IPC分类号: F04B300

    摘要: A vacuum pump including two gas friction pumps arranged parallel to each other and having each at least one stage having an inlet communicating with a common suction region and an outlet communicating with a separate discharge region, a multi-stage pump arranged downstream of the two gas friction pumps, connection conduits for communicating the separate discharge regions with a common discharge chamber, and a conduit for communicating the common discharge chamber with the suction chamber of the downstream pump.

    摘要翻译: 一种真空泵,包括彼此平行布置的两个气体摩擦泵,并且每个至少一个级具有与共同的吸入区域连通的入口和与单独的排放区域连通的出口;多级泵,布置在两个气体的下游 摩擦泵,用于使单独的排出区域与公共排放室连通的连接管道,以及用于使公共排放室与下游泵的吸入室连通的管道。

    Vacuum pump
    4.
    发明授权
    Vacuum pump 失效
    真空泵

    公开(公告)号:US06409477B1

    公开(公告)日:2002-06-25

    申请号:US09609978

    申请日:2000-07-05

    IPC分类号: F04B2308

    摘要: A vacuum pump including suction and discharge regions, two gas friction pumps arranged on opposite side of the suction region and parallel to each other and each having at least one stage and a discharge region channels connecting the discharge regions and providing for gas flow from the discharge regions into a common discharge region of the two gas friction pumps, and a multi-stage pump located downstream of both gas friction pumps for compressing the gas flowing through the multi-state pump and having a suction region and a discharge region connected with the discharge region of the vacuum pump, with gas flowing into the suction region from the common discharge region of the two gas friction pumps.

    摘要翻译: 一种包括吸入和排出区域的真空泵,两个气体摩擦泵,其布置在吸入区域的相对侧并且彼此平行并且各自具有至少一个级和连接排放区域的排放区域通道,并且提供来自排出口的气体流 区域分成两个气体摩擦泵的公共排放区域,以及多级泵,位于两个气体摩擦泵的下游,用于压缩流过多状态泵的气体,并具有与排出口连接的吸入区域和排出区域 真空泵的区域,气体从两个气体摩擦泵的共同排放区域流入吸入区域。