公开(公告)号：US08692385B2

公开(公告)日：2014-04-08

申请号：US13311146

申请日：2011-12-05

申请人： Aurélie Thuaire ,  Xavier Baillin ,  Nicolas Sillon

发明人： Aurélie Thuaire ,  Xavier Baillin ,  Nicolas Sillon

IPC分类号： H01L23/52 ,  B82Y10/00

CPC分类号： H01L21/76898

摘要： Device for connecting nano-objects to external electrical systems, and method for producing the device.According to the invention, which applies in particular to molecular characterization, a device including the following is produced: an upper layer equipped with upper contact pads to be connected to a nano-object; a lower layer, equipped with lower contact pads to be connected to an external electrical system; above the lower layer, a bonding layer including electrical through-vias in contact with the lower pads; and, between the bonding layer and the upper layer, at least two layers equipped with conductive lines and electrical vias, for connecting the upper pads to the lower pads.

摘要翻译： 用于将纳米物体连接到外部电气系统的装置以及用于制造该装置的方法。 根据本发明，其特别适用于分子表征，产生包括以下的器件：上层，其具有要连接到纳米物体的上接触焊盘; 下层，配有要连接到外部电气系统的下接触焊盘; 在所述下层之上，包括与所述下垫接触的电通孔的接合层; 并且在所述接合层和所述上层之间，具有至少两层配备有导线和电气通孔的层，用于将所述上焊盘连接到所述下焊盘。