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公开(公告)号:US10103001B2
公开(公告)日:2018-10-16
申请号:US15387534
申请日:2016-12-21
发明人: Xiaodong Han , Jianfei Zhang , Mao Shengcheng , Yadi Zhai , Xiaodong Wang , Zhipeng Li , Taonan Zhang , Dongfeng Ma , Xiaochen Li , Ze Zhang
摘要: A double-tilt in-situ mechanical sample holder for TEM based on piezoelectric ceramic drive belongs to the field of material microstructure-mechanical properties in-situ characterization, and it comprise two parts of sample holder shaft body and piezoelectric ceramic drive system. The sample holder shaft body comprise tilt stage, sample holder, linear stepping motor, drive rod, drive linkage. The piezoelectric ceramic drive system comprise piezoelectric ceramic loading stage, piezoelectric ceramic, connecting base and the sample loading stage realizing stretch or compression function. The double-axis tilt of the samples in X and Y axis directions is realized by the reciprocating motion back and forth of the drive rod driven by the linear stepping motor. The stretch or compression of the samples is realized by applying voltage on the piezoelectric ceramic to generate displacement and push the sample loading stage by the connecting base. The invention coordinating with high resolution TEM realizes the observation of the microstructure in atomic and even sub angstrom scales, and at the same time it ensures the controllable deformation of nanomaterials, further realizes the integrative research on the material microstructure-mechanical properties and reveals the deformation mechanism of the materials.
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公开(公告)号:US10103000B2
公开(公告)日:2018-10-16
申请号:US15387529
申请日:2016-12-21
发明人: Xiaodong Han , Jianfei Zhang , Mao Shengcheng , Yadi Zhai , Xiaodong Wang , Zhipeng Li , Xiaochen Li , Taonan Zhang , Dongfeng Ma , Ze Zhang
摘要: A double-tilt sample holder for TEM, comprising: it comprise the main body of sample holder body, front-end tilt stage, drive rod, linkage, tilt axis, rotation axis, fixed axis of drive rod and sample loading stage. The axis hole is arranged at the front-end tilt stage, which is connected to the main body of the sample holder body by the tilt axis. The linkage, the boss slot and the drive rod slot are connected by the rotation axis. Two through movement guide grooves are designed symmetrically at both sides of the front-end of sample holder body, and the drive rod is fixed by the fixed axis of the drive rod, which restricts the drive rod to move reciprocally in a straight line driven by the linear stepping motor at the back-end of the main body of the holder body, further leading the tilt stage to rotate around the tilt axis. The tilt angle of the sample loading stage can be precisely controlled by the high precision linear stepping motor in the apparatus. The maximum tilt angle of the sample stage can be adjusted by the included angle between the boss at the bottom surface of the front-end tilt stage and the horizontal direction and the length of the movement guide groove in the apparatus. The apparatus can be used coordinately with TEM and its universality is wide.
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公开(公告)号:US10410822B2
公开(公告)日:2019-09-10
申请号:US15510627
申请日:2016-11-11
发明人: Xiaodong Han , Zhipeng Li , Shengcheng Mao , Xiaodong Wang , Chunqiang Zhuang , Jianfei Zhang , Qingsong Deng , Yadi Zhai , Taonan Zhang , Ze Zhang
摘要: A double-tilt in-situ nanoindentation platform for TEM (transmission electron microscope) belongs to the field of in-situ characterization of the mechanical property-microstructure relationship of materials at the nano- and atomic scale. The platform is consisted of adhesive area, support beams, bearing beams, sample loading stage and mini indenter. The overall structure of the platform is prepared by semiconductor microfabrication technology. The in-situ nanoindentation experiment can be driven by bimetallic strip, V-shaped electro-thermal beam, piezoelectric ceramics, electrostatic comb or shape memory alloys et. al. The sample is obtained by focused ion beam cutting. The integrated platform can be placed in the narrow space on the front end of the TEM sample holder, giving rise to the condition of double-axis tilt. The driving device drives the mini indenter to carry out in-situ nanoindentation, in-situ compression and in-situ bending and the like of the materials in TEM. The deformation process of material can be in-situ observed in sub angstrom, atomic and nano scale to study the deformation mechanism of material, which can further reveal the relationship of microstructure-mechanical properties of the material.
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