公开(公告)号：US3779647A

公开(公告)日：1973-12-18

申请号：US3779647D

申请日：1971-09-07

Applicant: BENDIX CORP

Inventor： DAWSON J

IPC: G01D5/38 ,  G01B9/02

CPC classification number: G01D5/38

Abstract: An apparatus for measuring the displacement of a part such as a work performing tool or a measuring probe of a flatness measuring instrument. The apparatus includes means for providing a collimated laser beam that is disposed parallel to and displaced slightly from a predetermined plane of motion. Two identical prisms are placed side by side to intercept different portions of the laser beam. These prisms direct the intercepted portions of the laser beam to intersect and provide an interference pattern comprising a series of adjacent interference planes. An optical grating is attached to a part that is to be moved nominally along the predetermined plane of motion. This grating intercepts the interference planes and provides a Moire fringe output signal that varies in response to any displacement of the part perpendicular to the plane of motion. Electronic apparatus detects and measures this Moire fringe pattern variation and provides an output indicating the magnitude and direction of any perpendicular displacement.

Abstract translation: 一种用于测量诸如平面度测量仪器的工作执行工具或测量探针的部件的位移的装置。 该装置包括用于提供平行于预定的运动平面并稍微偏离的准直激光束的装置。 两个相同的棱镜并排放置以截取激光束的不同部分。 这些棱镜引导激光束的截取的部分相交并提供包括一系列相邻干涉面的干涉图案。 光栅连接到要沿着预定的运动平面移动的部分。 该光栅拦截干涉面，并提供一个莫尔条纹输出信号，该信号响应垂直于运动平面的部分的任何位移而变化。 电子设备检测并测量这种莫尔条纹图案变化，并提供指示任何垂直位移的大小和方向的输出。