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公开(公告)号：US10254131B2
公开(公告)日：2019-04-09
申请号：US15512890
申请日：2016-09-22
发明人： Guodong Li , Zhen Wei , Shibo Guo , Weiwei Sun , Chenchen Jiang , Qiong Zhao
摘要： A detection device, a substrate holder and a method for detecting a position of a substrate on a substrate holder are disclosed. The detection device of the present disclosure is used to detect the position of the substrate carried on the substrate holder, and the substrate holder includes a plurality of carrying positions, each of which is used to carry a substrate. The detection device includes an emitting electrode connected to a signal source, which is disposed at an edge of each carrying position and located at one of upper and lower sides of the substrate carried by the carrying position; and at least one receiving electrode connected to a detector, which is disposed opposite to the emitting electrode and located at the other of the upper and lower sides of the substrate carried by the carrying position.
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2.发明申请公开(公告)号：US20170299407A1
公开(公告)日：2017-10-19
申请号：US15512890
申请日：2016-09-22
发明人： Guodong Li , Zhen Wei , Shibo Guo , Weiwei Sun , Chenchen Jiang , Qiong Zhao
IPC分类号： G01D5/20
CPC分类号： G01D5/20 , G01D5/2412
摘要： A detection device, a substrate holder and a method for detecting a position of a substrate on a substrate holder are disclosed. The detection device of the present disclosure is used to detect the position of the substrate carried on the substrate holder, and the substrate holder includes a plurality of carrying positions, each of which is used to carry a substrate. The detection device includes an emitting electrode connected to a signal source, which is disposed at an edge of each carrying position and located at one of upper and lower sides of the substrate carried by the carrying position; and at least one receiving electrode connected to a detector, which is disposed opposite to the emitting electrode and located at the other of the upper and lower sides of the substrate carried by the carrying position.
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