公开(公告)号：US10406679B2

公开(公告)日：2019-09-10

申请号：US15012425

申请日：2016-02-01

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  David Martin ,  Ulysses Gilchrist

IPC: B25J9/04 ,  H01L21/677

Abstract: A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.

公开(公告)号：US20200001451A1

公开(公告)日：2020-01-02

申请号：US16566730

申请日：2019-09-10

Applicant: BROOKS AUTOMATION, INC.

Inventor： Robert T. Caveney ,  David Martin ,  Ulysses Gilchrist

IPC: B25J9/04 ,  H01L21/677

Abstract: A substrate transport apparatus comprising a drive section, a controller, an upper arm, forearm and substrate holder. A proximate end of the upper arm being rotatably mounted to the drive section at a shoulder joint. A proximate end of the forearm being rotatably mounted to a distal end of the upper arm at an elbow joint. The substrate holder being rotatably mounted to a distal end of the forearm at a wrist joint. The upper arm and the forearm being unequal in length from joint center to joint center. The substrate transport arm is adapted to transport substrate to and from at least two substrate holding areas with the drive section of the transport apparatus remaining in a fixed position relative to the holding areas. Each of the upper arm, forearm and substrate holder being independently rotatable with respect to each other.