公开(公告)号：US10605788B2

公开(公告)日：2020-03-31

申请号：US15383041

申请日：2016-12-19

申请人： Bei Tong ,  Yang Li ,  Zhuofan Zhou ,  Jun Ouyang ,  Benpeng Zhu

发明人： Bei Tong ,  Yang Li ,  Zhuofan Zhou ,  Jun Ouyang ,  Benpeng Zhu

IPC分类号： H01L41/04 ,  G01N29/24 ,  G01R33/09 ,  G01R33/02

摘要： A SAW (Surface Acoustic Wave) magnetic sensor includes: a piezoelectric thin film; a seed layer; an interdigital transducer arranged respectively on each side of the piezoelectric thin film, the interdigital transducer comprising an interdigital electrode made from magnetic materials, and reflector grids located at both ends of the interdigital electrode; an underlying substrate arranged at the seed layer opposite to the piezoelectric thin film. A manufacturing method for the sensor is also disclosed.

公开(公告)号：US20170363584A1

公开(公告)日：2017-12-21

申请号：US15383041

申请日：2016-12-19

申请人： Bei Tong ,  Yang Li ,  Zhuofan Zhou ,  Jun Ouyang ,  Benpeng Zhu

发明人： Bei Tong ,  Yang Li ,  Zhuofan Zhou ,  Jun Ouyang ,  Benpeng Zhu

IPC分类号： G01N29/24

CPC分类号： G01N29/2462 ,  G01N29/2412 ,  G01N29/2437 ,  G01N29/2468 ,  G01N2291/02863 ,  G01R33/02 ,  G01R33/095

摘要： A SAW (Surface Acoustic Wave) magnetic sensor includes: a piezoelectric thin film; a seed layer; an interdigital transducer arranged respectively on each side of the piezoelectric thin film, the interdigital transducer comprising an interdigital electrode made from magnetic materials, and reflector grids located at both ends of the interdigital electrode; an underlying substrate arranged at the seed layer opposite to the piezoelectric thin film. A manufacturing method for the sensor is also disclosed.