Wafer bonded silicon radiation detectors
    1.
    发明申请
    Wafer bonded silicon radiation detectors 审中-公开
    晶圆接合硅辐射探测器

    公开(公告)号:US20060118728A1

    公开(公告)日:2006-06-08

    申请号:US11258464

    申请日:2005-10-25

    IPC分类号: G01T1/24

    CPC分类号: G01T1/24

    摘要: An apparatus and method for operating a direct wafer bonded semiconductor radiation detector includes bonding a plurality of wafers, receiving a radiation signal from a radiation source thereby producing electron and hole pairs via the radiation signal interacting with the detecting device. A voltage source produces a voltage across the direct bonded wafers, thereby drifting the electrons and holes through the plurality of bonded layers. The drifted electrons and/or holes include total drifted charge information of the detector and are collected and processed either at the detector or remote from the detector.

    摘要翻译: 用于操作直接晶片接合半导体辐射检测器的装置和方法包括:接合多个晶片,从辐射源接收辐射信号,从而通过与检测装置相互作用的辐射信号产生电子和空穴对。 电压源在直接接合的晶片上产生电压,从而通过多个接合层漂移电子和空穴。 漂移的电子和/或空穴包括检测器的总漂移电荷信息,并且在检测器处或者远离检测器被收集和处理。