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公开(公告)号：US07134219B2
公开(公告)日：2006-11-14
申请号：US11132976
申请日：2005-05-18
IPC分类号： G01D21/00
CPC分类号： G01D5/35303
摘要： A lightweight, small size, high sensitivity gauge for indirectly measuring displacement or absolute gap width by measuring axial strain in an orthogonal direction to the displacement/gap width. The gap gauge includes a preferably titanium base having a central tension bar with springs connecting opposite ends of the tension bar to a pair of end connector bars, and an elongated bow spring connected to the end connector bars with a middle section bowed away from the base to define a gap. The bow spring is capable of producing an axial strain in the base proportional to a displacement of the middle section in a direction orthogonal to the base. And a strain sensor, such as a Fabry-Perot interferometer strain sensor, is connected to measure the axial strain in the base, so that the displacement of the middle section may be indirectly determined from the measurement of the axial strain in the base.
摘要翻译： 通过测量与位移/间隙宽度正交的方向上的轴向应变，可以间接测量位移或绝对间隙宽度的轻便小尺寸高灵敏度计。 间隙计包括优选的钛基底，其具有中心拉杆，中心拉杆具有将拉杆的相对端连接到一对末端连接杆的弹簧，以及连接到末端连接杆的细长弓形弹簧，中间部分从基部弯曲 定义差距。 弓形弹簧能够在与基座正交的方向上与中间部分的位移成比例地产生基座中的轴向应变。 并且连接诸如法布里 - 珀罗干涉仪应变传感器的应变传感器以测量基座中的轴向应变，使得中间部分的位移可以从基底中的轴向应变的测量间接确定。
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公开(公告)号：US07277605B2
公开(公告)日：2007-10-02
申请号：US11132663
申请日：2005-05-18
IPC分类号： G02B6/00
CPC分类号： G01D5/35303 , G01K11/3213 , G02B6/29359
摘要： A Fabry-Perot cavity is formed by a partially or wholly reflective surface on the free end of an integrated elongate channel or an integrated bounding wall of a chip of a wafer and a partially reflective surface on the end of the optical fiber. Such a constructed device can be utilized to detect one or more physical parameters, such as, for example, strain, through the optical fiber using an optical detection system to provide measuring accuracies of less than aboutb0.1%.
摘要翻译： 法布里 - 珀罗腔通过部分或全部反射的表面形成，该表面位于集成的细长通道的自由端或晶片芯片的集成的界限壁和光纤端部上的部分反射表面上。 这种构造的装置可以用于通过使用光学检测系统的光纤检测一个或多个物理参数，例如应变，以提供小于约百分之一点一的测量精度。
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