公开(公告)号：US11311917B2

公开(公告)日：2022-04-26

申请号：US15400143

申请日：2017-01-06

申请人： Bruker Nano, Inc.

发明人： Jeffrey E. LeClaire ,  Kenneth G. Roessler ,  David Brinkley ,  Alexander M. Figliolini

IPC分类号： B08B7/00 ,  G03F1/84 ,  G03F1/82

摘要： Method and apparatus for identifying a contaminant on a substrate. Identification of a contaminant removed from a substrate can be useful in identifying and eliminating or reducing the source of the contamination and tailoring the removal method to minimize the potential for substrate damage. The methods and apparatus for identification of the contaminant provide liberation of molecules of the contaminant from the surface of the substrate, accounting for different geometries and substrate materials, sample preparation, and chemical analysis of the contaminant.