-
公开(公告)号：US20210190818A1
公开(公告)日：2021-06-24
申请号：US16952579
申请日：2020-11-19
申请人： Bruker Nano GmbH
摘要： The invention relates to a measuring device for a scanning probe microscope that comprises the following: a sample receptacle which is configured to receive a measurement sample to be examined; a measuring probe which is arranged on a probe holder and has a probe tip with which the measurement sample can be measured; a displacement device which is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, such that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction; a control device which is connected to the displacement device and controls the relative movement between the measuring probe and the sample receptacle; and a sensor device that is configured to detect movement measurement signals for an actual movement of the measuring probe and/or of the sample receptacle that is executed during the relative movement between the measuring probe and the sample receptacle in order to measure the measurement sample, and to relay the movement measurement signals to the control device, the movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction. The control device is configured to control the relative movement between the measuring probe and the sample receptacle in such a way that the displacement device is acted upon by the control device with compensating control signal components which cause a first countermovement which substantially compensates for the first disruptive movement component in the first spatial direction, and/or cause a second countermovement which substantially compensates for the second disruptive movement component in the second spatial direction. Furthermore, a scanning probe microscope comprising the measuring device and a method for scanning probe microscopic examination of a measurement sample by means of a scanning probe microscope are provided.
-
公开(公告)号：US20220244287A1
公开(公告)日：2022-08-04
申请号：US17620375
申请日：2020-06-18
申请人： Bruker Nano GmbH
摘要： The invention relates to an arrangement having a measuring apparatus for a scanning probe microscope, comprising: a sample receptacle, which is designed to receive a measurement sample for an examination by scanning probe microscopy; a measuring probe, which is received on a probe holder; a relocating device, which has a drive and is designed to relocate the sample receptacle and the probe holder having the measuring probe relative to each another by means of the drive for the examination by scanning probe microscopy; and an active counterweight device having a counterweight and a drive device associated with the counterweight, the active counterweight device being designed to move the counterweight during the measuring operation by means of the drive device, counter to the movement of the probe holder having the measuring probe. The invention furthermore relates to a method for operating the arrangement.
-
公开(公告)号：US11656244B2
公开(公告)日：2023-05-23
申请号：US16952579
申请日：2020-11-19
申请人： Bruker Nano GmbH
CPC分类号： G01Q10/065 , G01Q30/04
摘要： The invention relates to a measuring device for a scanning probe microscope that includes a sample receptacle which is configured to receive a measurement sample to be examined, a measuring probe which is arranged on a probe holder and has a probe tip with which the measurement sample can be measured. A displacement device is configured to move the measuring probe and the sample receptacle relative to each other, in order to measure the measurement sample, such that the measuring probe, in order to measure the measurement sample, executes a raster movement relative to said measurement sample in at least one spatial direction. Movement measurement signals indicating a first movement component in a first spatial direction that disrupts the raster movement and a second movement component in a second spatial direction that disrupts the raster movement, which second spatial direction extends transversely to the first spatial direction. Compensating control signal components cause a first countermovement which substantially compensates for the first disruptive movement component in the first spatial direction, and/or cause a second countermovement which substantially compensates for the second disruptive movement component in the second spatial direction.
-
-
搜索结果
3 条记录 (耗时 0.013 秒)
