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    Method of manufacturing inkjet printhead using crosslinked polymer
    3.
    发明申请
    Method of manufacturing inkjet printhead using crosslinked polymer 审中-公开
    使用交联聚合物制造喷墨打印头的方法

    公开(公告)号：US20060262157A1

    公开(公告)日：2006-11-23

    申请号：US11415198

    申请日：2006-05-02

    申请人： Byung-ha Park ,  Young-ung Ha ,  Sung-joon Park ,  Jae-sik Min ,  Kyong-il Kim

    发明人： Byung-ha Park ,  Young-ung Ha ,  Sung-joon Park ,  Jae-sik Min ,  Kyong-il Kim

    IPC分类号： B41J2/015 ,  G01D15/00

    CPC分类号： B41J2/1603 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  Y10T29/49401

    摘要： A method of manufacturing an inkjet printhead includes preparing a substrate having a heater to hear ink and an electrode to supply current to the heater, applying a crosslinked polymer resist composition to the substrate having the heater and the electrode and patterning the same, and forming a passage forming layer that surrounds an ink passage, patterning the substrate having the passage forming layer by photolithography at least twice, and forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer, applying the crosslinked polymer resist composition to the passage forming layer and the sacrificial layer and patterning the same, and forming a nozzle layer having a nozzle, etching the substrate from the bottom surface thereof to be perforated, and forming an ink supply hole, and removing the sacrificial layer, wherein the crosslinked polymer resist composition comprises a precursor polymer that is a phenolic novolak resin having glycidyl ether functional groups on repeating monomer units.

    摘要翻译： 一种制造喷墨打印头的方法包括：制备具有加热器以吸收油墨的基板和向加热器供应电流的电极，将交联聚合物抗蚀剂组合物施加到具有加热器和电极的基板上，并对其进行图案化， 包围油墨通道的通道形成层，通过光刻法将具有通道形成层的基板图案化至少两次，并且在由通道形成层包围的空间中形成具有平坦化顶表面的牺牲层，将交联聚合物抗蚀剂组合物施加到 通道形成层和牺牲层并对其进行图案化，并形成具有喷嘴的喷嘴层，从其底面蚀刻基板以进行穿孔，形成供墨孔，并除去牺牲层，其中交联 聚合物抗蚀剂组合物包含具有gly的酚醛清漆树脂的前体聚合物 重复单体单元上的椰子醚官能团。

    Inkjet printer head and method of fabricating the same
    4.
    发明申请
    Inkjet printer head and method of fabricating the same 审中-公开
    喷墨打印头及其制造方法

    公开(公告)号：US20060044347A1

    公开(公告)日：2006-03-02

    申请号：US11071363

    申请日：2005-03-04

    申请人： Myong-jong Kwon ,  Kyong-il Kim ,  Kwang-ryul Kim ,  Nam-kyun Kim ,  Byung-ha Park ,  Yong-shik Park ,  Eun-bong Han ,  Young-ung Ha ,  Sung-joon Park ,  Jae-sik Min

    发明人： Myong-jong Kwon ,  Kyong-il Kim ,  Kwang-ryul Kim ,  Nam-kyun Kim ,  Byung-ha Park ,  Yong-shik Park ,  Eun-bong Han ,  Young-ung Ha ,  Sung-joon Park ,  Jae-sik Min

    IPC分类号： B41J2/135

    CPC分类号： B41J2/1603 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1645

    摘要： An inkjet printer head includes a substrate having an ink-feed hole to supply ink stored in a cartridge to an ink chamber and a restrictor in fluid communication with the ink chamber, an oxide layer formed on the substrate, a heater disposed on the oxide layer above the restrictor and having fixed parts disposed on the oxide layer, slopes extending upward and away from the restrictor at an incline, and a parallel part extending between the slopes parallel to the substrate, a lead formed to be in electrical contact with the heater, a chamber layer formed to cover the lead and to define the ink chamber, and a nozzle layer formed on the chamber layer and having a nozzle. In the inkjet printer head, the lifespan of the heater may be extended since the heater is supported by the slopes, which function as a shock absorbing member when ink supply pressure or cavitation force is applied to a surface of the heater. In addition, since the heater does not have a right angle structure, the heater may be formed to have a uniform thickness even when a thin layer used for the heater is formed by a deposition method.

    摘要翻译： 一种喷墨打印头包括：具有供墨孔的基板，用于将存储在墨盒中的墨水供应到墨室;以及限制器，其与所述墨室流体连通;形成在所述基板上的氧化物层;设置在所述氧化物层上的加热器 在限流器上方并且具有设置在氧化物层上的固定部分，倾斜在倾斜处向上延伸并远离限制器，并且平行部分在平行于衬底的斜面之间延伸，形成为与加热器电接触的引线， 形成为覆盖引线并限定墨水室的室层，以及形成在室层上并具有喷嘴的喷嘴层。 在喷墨打印机头中，加热器的寿命可以延长，因为加热器由斜面支撑，当墨水供应压力或空穴力施加到加热器的表面时，该斜面用作减震构件。 此外，由于加热器不具有直角结构，即使当通过沉积方法形成用于加热器的薄层时，也可以将加热器形成为具有均匀的厚度。

    METHOD OF MANUFACTURING INKJET PRINTHEAD USING CROSSLINKED POLYMER
    5.
    发明申请
    METHOD OF MANUFACTURING INKJET PRINTHEAD USING CROSSLINKED POLYMER 审中-公开
    使用交联聚合物制造喷嘴的方法

    公开(公告)号：US20070256301A1

    公开(公告)日：2007-11-08

    申请号：US11772541

    申请日：2007-07-02

    申请人： Byung-ha PARK ,  Young-ung Ha ,  Sung-joon Park ,  Jae-sik Min ,  Kyong-il Kim

    发明人： Byung-ha PARK ,  Young-ung Ha ,  Sung-joon Park ,  Jae-sik Min ,  Kyong-il Kim

    IPC分类号： B21D53/78

    CPC分类号： B41J2/1603 ,  B41J2/1631 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  Y10T29/49401

    摘要： Provided is a method of manufacturing an inkjet printhead. The method includes: preparing a substrate having thereon a heater for heating ink and an electrode for supplying current to the heater; applying a negative photoresist composition to the substrate having thereon the heater and the electrode and patterning the same to form a passage forming layer that surrounds an ink passage; patterning the substrate having thereon the passage forming layer by photolithography at least twice to form a sacrificial layer having a planarized upper surface in a space surrounded by the passage forming layer; applying the negative photoresist composition to the passage forming layer and the sacrificial layer and patterning the same to form a nozzle layer having a nozzle; etching the substrate from the rear surface thereof to be perforated to form an ink supply hole; and removing the sacrificial layer, wherein the negative photoresist composition includes a prepolymer that has a glycidyl ether functional group or a ring-opened glycidyl ether functional group on monomer repeating units thereof and a phenolic novolak resin-based backbone, a bisphenol A-based backbone, or an alicyclic-based backbone. The sacrificial layer may be planarized using a chemical mechanical polishing process. Therefore, an upper surface of the sacrificial layer can be planarized, and thus, it is possible to easily control a shape and dimension of an ink passage, thereby improving uniformity of the ink passage.

    摘要翻译： 提供一种制造喷墨打印头的方法。 该方法包括：制备其上具有用于加热油墨的加热器和用于向加热器供应电流的电极的基板; 在其上具有加热器和电极的基板上施加负性光致抗蚀剂组合物并将其图案化，以形成围绕墨水通道的通道形成层; 通过光刻将其上具有通道形成层的基板图案化至少两次，以在由通道形成层包围的空间中形成具有平坦化的上表面的牺牲层; 将所述负性光致抗蚀剂组合物施加到所述通道形成层和所述牺牲层并且将其图案化以形成具有喷嘴的喷嘴层; 从其背面蚀刻基板以进行穿孔以形成供墨孔; 并且除去牺牲层，其中负性光致抗蚀剂组合物包含在其单体重复单元上具有缩水甘油醚官能团或开环缩水甘油醚官能团的预聚物和酚醛清漆树脂基骨架，双酚A基骨架 ，或脂环族骨架。 牺牲层可以使用化学机械抛光工艺进行平面化。 因此，可以使牺牲层的上表面平坦化，从而可以容易地控制墨通道的形状和尺寸，从而提高墨通道的均匀性。

    Inkjet printer head and method of manufacturing the same
    6.
    发明申请
    Inkjet printer head and method of manufacturing the same 审中-公开
    喷墨打印头及其制造方法

    公开(公告)号：US20060061629A1

    公开(公告)日：2006-03-23

    申请号：US11071350

    申请日：2005-03-04

    申请人： Sung-joon Park ,  Myong-jong Kwon ,  Kyong-il Kim ,  Kwang-ryul Kim ,  Nam-kyun Kim ,  Yong-shik Park ,  Eun-bong Han ,  Young-ung Ha ,  Jae-sik Min ,  Byung-ha Park

    发明人： Sung-joon Park ,  Myong-jong Kwon ,  Kyong-il Kim ,  Kwang-ryul Kim ,  Nam-kyun Kim ,  Yong-shik Park ,  Eun-bong Han ,  Young-ung Ha ,  Jae-sik Min ,  Byung-ha Park

    IPC分类号： B41J2/05

    CPC分类号： B41J2/1601 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1631 ,  B41J2/1634 ,  B41J2/1639 ,  B41J2/1642 ,  B41J2/1646

    摘要： An inkjet printer head includes a substrate having a manifold and an ink channel to supply ink, a nozzle plate formed on the substrate, a chamber formed between the substrate and the nozzle plate and extending toward the substrate and the nozzle plate, an electrode formed at an interface between the substrate and the nozzle plate and around the chamber, and a heater having both ends extending in contact with the electrode to be suspended on the chamber in direct contact with the ink and to generate bubbles from both surfaces thereof. The inkjet printer head is capable of improving manufacturing process efficiency by omitting a process of separately forming a heater passivation layer, operating the heater at low electric power by omitting the heater passivation layer, improving integrity of a nozzle by lowering a working voltage, and improving reliability in manufacturing processes by locating the suspended heater to be in parallel with the substrate and the electrode.

    摘要翻译： 喷墨打印头包括具有歧管和用于供应墨水的墨水通道的基板，形成在基板上的喷嘴板，形成在基板和喷嘴板之间并且朝向基板和喷嘴板延伸的腔室，形成在 衬底和喷嘴板之间以及围绕室的界面，以及加热器，其两端延伸成与电极接触，以悬浮在与油墨直接接触的室上并从其两个表面产生气泡。 喷墨打印头能够通过省略分开形成加热器钝化层的过程来提高制造工艺效率，通过省略加热器钝化层以低功率操作加热器，通过降低工作电压来改善喷嘴的完整性，并且改进 通过将悬挂的加热器定位成与基底和电极平行的方式制造过程中的可靠性。

    Inkjet printhead and method of manufacturing the same
    7.
    发明授权
    Inkjet printhead and method of manufacturing the same 失效
    喷墨打印头及其制造方法

    公开(公告)号：US07607759B2

    公开(公告)日：2009-10-27

    申请号：US11379291

    申请日：2006-04-19

    申请人： Jae-sik Min ,  Byung-ha Park ,  Kyong-il Kim ,  Young-ung Ha

    发明人： Jae-sik Min ,  Byung-ha Park ,  Kyong-il Kim ,  Young-ung Ha

    IPC分类号： B41J2/05

    CPC分类号： B41J2/14137 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1632 ,  B41J2002/1437

    摘要： An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.

    摘要翻译： 喷墨打印头及其制造方法。 在喷墨打印头中，基板包括形成在顶表面中以容纳要喷射的墨的墨室，形成在底表面中以将油墨供应到墨室的墨供给孔以及形成在墨室和墨室之间的限流器 墨水供墨孔连接墨水室和墨水供墨孔。 在基板上形成多个钝化层。 在钝化层之间形成加热器和向加热器施加电流的导体。 在钝化层上形成预定形状的传热层。 形成环氧喷嘴层以覆盖钝化层和传热层。 环氧喷嘴层形成有连接到墨室的喷嘴。

    INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME
    10.
    发明申请
    INKJET PRINTHEAD AND METHOD OF MANUFACTURING THE SAME 失效
    喷墨打印机及其制造方法

    公开(公告)号：US20070046732A1

    公开(公告)日：2007-03-01

    申请号：US11379291

    申请日：2006-04-19

    申请人： Jae-sik Min ,  Byung-ha Park ,  Kyong-il Kim ,  Young-ung Ha

    发明人： Jae-sik Min ,  Byung-ha Park ,  Kyong-il Kim ,  Young-ung Ha

    IPC分类号： B41J2/05

    CPC分类号： B41J2/14137 ,  B41J2/1603 ,  B41J2/1628 ,  B41J2/1632 ,  B41J2002/1437

    摘要： An inkjet printhead and a method of manufacturing the same. In the inkjet printhead, a substrate includes an ink chamber formed in a top surface to contain ink to be ejected, an ink feedhole formed in a bottom surface to supply the ink to the ink chamber, and a restrictor formed between the ink chamber and the ink feedhole to connect the ink chamber and the ink feedhole. A plurality of passivation layers are formed on the substrate. A heater and a conductor to apply a current to the heater are formed between the passivation layers. A heat transfer layer is formed on the passivation layers in a predetermined shape. An epoxy nozzle layer is formed to cover the passivation layers and the heat transfer layer. The epoxy nozzle layer is formed with a nozzle that is connected to the ink chamber.

    摘要翻译： 喷墨打印头及其制造方法。 在喷墨打印头中，基板包括形成在顶表面中以容纳要喷射的墨的墨室，形成在底表面中以将油墨供应到墨室的墨供给孔以及形成在墨室和墨室之间的限流器 墨水供墨孔连接墨水室和墨水供墨孔。 在基板上形成多个钝化层。 在钝化层之间形成加热器和向加热器施加电流的导体。 在钝化层上形成预定形状的传热层。 形成环氧喷嘴层以覆盖钝化层和传热层。 环氧喷嘴层形成有连接到墨室的喷嘴。