公开(公告)号：US09373554B2

公开(公告)日：2016-06-21

申请号：US14315155

申请日：2014-06-25

Applicant: CAMBRIDGE DISPLAY TECHNOLOGY LIMITED

Inventor： Graham Anderson ,  Michael Cass ,  Daniel Forsythe

IPC: H01L21/66 ,  H01L51/56 ,  H01L27/32

CPC classification number: H01L22/26 ,  H01L22/12 ,  H01L27/3211 ,  H01L51/56 ,  H01L2251/558

Abstract: A method of monitoring an OLED production process for making an OLED device is disclosed. According to the method, at least one reference OLED device similar to said OLED device is fabricated. Said at least one reference OLED device has a layered structure corresponding to said OLED device and a range of hole injection and/or transport layer thicknesses. A spectral variation of a light output of said at least one reference OLED device with respect to variation in said hole injection and/or transport layer thickness is characterized. A said OLED device is partially fabricated by depositing one or more layers comprising at least said hole injection and/or transport layer and a thickness of said one or more layers is measured such that a light output for said partially fabricated OLED device can be predicted, in a target color space, from said measuring, using said characterized spectral variation.

Abstract translation: 公开了一种监视用于制造OLED器件的OLED制造工艺的方法。 根据该方法，制造与所述OLED器件类似的至少一个参考OLED器件。 所述至少一个参考OLED器件具有对应于所述OLED器件的分层结构和一定范围的空穴注入和/或传输层厚度。 表征所述至少一个参考OLED器件的光输出相对于所述空穴注入和/或传输层厚度的变化的光谱变化。 所述OLED器件通过沉积包含至少所述空穴注入和/或传输层的一个或多个层而部分地制造，并且测量所述一个或多个层的厚度，使得可以预测所述部分制造的OLED器件的光输出， 在目标色彩空间中，从所述测量，使用所述表征的光谱变化。

公开(公告)号：US20150031147A1

公开(公告)日：2015-01-29

申请号：US14315155

申请日：2014-06-25

Applicant: CAMBRIDGE DISPLAY TECHNOLOGY LIMITED

Inventor： Graham Anderson ,  Michael Cass ,  Daniel Forsythe

IPC: H01L21/66 ,  H01L51/56

CPC classification number: H01L22/26 ,  H01L22/12 ,  H01L27/3211 ,  H01L51/56 ,  H01L2251/558

Abstract: A method of monitoring an OLED production process for making a production process OLED device, the production process OLED device having a layered structure comprising an anode layer and a cathode layer, said anode and cathode layers sandwiching a hole injection layer, a hole transport layer and at least one organic light emitting layer, the method comprising: fabricating at least one similar OLED device to said production process OLED device, wherein said at least one similar OLED device has a layered structure corresponding to said production process OLED device and a range of hole injection and/or transport layer thicknesses; characterising a spectral variation of a light output of said at least one similar OLED device with respect to variation in said hole injection and/or transport layer thickness; partially fabricating a said production process OLED device using said production process, wherein said partial fabrication comprises depositing one or more layers comprising at least said hole injection and/or transport layer; measuring a thickness of said one or more layers comprising at least said hole injection and/or transport layer; predicting a light output for said partially fabricated production process OLED device, in a target colour space, from said measuring, using said characterised spectral variation; and monitoring said production process using said predicted light output.

Abstract translation: 一种用于制造OLED器件的OLED生产方法的监控方法，所述生产工艺OLED器件具有包括阳极层和阴极层的分层结构，所述阳极和阴极层夹着空穴注入层，空穴传输层和 至少一个有机发光层，所述方法包括：将至少一个类似的OLED器件制造到所述生产工艺OLED器件，其中所述至少一个相似的OLED器件具有对应于所述生产工艺OLED器件的层状结构和一定范围的孔 注入和/或传输层厚度; 表征所述至少一个类似OLED器件的光输出相对于所述空穴注入和/或传输层厚度的变化的光谱变化; 使用所述生产方法部分地制造所述生产工艺OLED器件，其中所述部分制造包括沉积包含至少所述空穴注入和/或传输层的一个或多个层; 测量包含至少所述空穴注入和/或传输层的所述一层或多层的厚度; 使用所述表征的光谱变化预测来自所述测量的所述部分制造的制造工艺OLED器件在目标色彩空间中的光输出; 以及使用所述预测光输出来监视所述生产过程。